Work

Inexpensive MEMS Packaging

Year: 2001

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-94-010-0840-2_11

Authors: R. Kazinczi, J. R. Mollinger, A. Bossche

Institution: Delft University of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W6735172

FWCI: 2.765

Cites: 6

Cited by: 2

Related to: 10