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Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications (vol 11, 11, 2025)

Year: 2025
Type: article
Source: Figshare
Authors: Anthony P McFfadden (21429773), Aranya Goswami (9651754), Tongyu Zhao (11305905), Teun van Schijndel (21429776), Trevyn FQ Larson (21429779), Sudhir Sahu (21429782), Stephen Gill (13096200), Florent Lecocq (20503355), Raymond Simmonds (21429785), Chris Palmstrom (21429788)
Language: English
Open Access status: closed
OpenAlex ID: W7112499286
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