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Recent developments in coherent Fourier scatterometry

Year: 2025

Type: article

Source: Springer Link (Chiba Institute of Technology)

DOI: 10.1051/epjconf/202533503041/pdf

Authors: Anubhav Paul, Sarika Soman, Silvania F. Pereira

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7127099352

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