Work

Virtual Fabrication for Semiconductor Sensor Development: Process Modeling and Design Optimization

Year: 2026

Type: article

Source: Journal of Sensor Science and Technology

DOI: 10.46670/jsst.2026.35.1.53

Authors: Hee Yeoun Kim, Joontaek Jung, Hyeonseol Kim, Jubeom Lee, Taehyun Kim

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

Funders: Ministry of Trade, Industry and Energy, Ministry of SMEs and Startups, Korea Evaluation Institute of Industrial Technology

Awards: G1749535526, G2967245454, G5627888344, G6877092278, G6888718511

OpenAlex ID: W7128714560

FWCI:

Cites: 40

Cited by:

Related to: 10