Work

ELECTRICAL PROPERTIES OF Si ION-IMPLANTED GaN MISFET

Year: 2013
Type: conference-paper
Abstract: I-V characteristics of Si ion implanted normally-off GaN MISFET were demonstrated. I_dss of 94.3 mA/mm, g_mmax of 36.9 mS/mm and threshold voltage of +1.5 V were obtained for GaN MISFETs with a gate length of 0.6 μm.
Institution: Hosei University
Language: English
Open Access status: green
OpenAlex ID: W7144058630
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