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イオンビーム照射によりアモルファス化したSi表面のXRR測定

Year: 2024

Type: conference-paper

Source: Institutional Repositories DataBase (IRDB)

Authors: 佐藤, 美那, Sato, Mina, 遠西, 美重, Tohnishi, Mie, 松谷, 晃宏, Matsutani, Akihiro

Language: Japanese

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7145108398

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