Work

RFマグネトロンスパッタリング法による(001)配向Pt下部電極の作製とCSD 法PZT薄膜の電気特性

Year: 2013

Type: conference-paper

Source: Institutional Repositories DataBase (IRDB)

Authors: 坂元, 尚紀, Sakamoto, Naonori, 篠崎, 和夫, SHINOZAKI, KAZUO, 鈴木, 久男, Suzuki, Hisao, 脇谷, 尚樹, Wakiya, Naoki

Language: Japanese

Topic: Ferroelectric and Piezoelectric Materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7146580418

FWCI:

Cites:

Cited by:

Related to: 10