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小型マイクロ波放電式中和器における推進剤流量依存性の数値解析

Type: conference-paper

Source: Institutional Repositories DataBase (IRDB)

Authors: 児玉, 岳斗, 小泉, 宏之, 鷹尾, 祥典, KODAMA, Taketo, KOIZUMI, Hiroyuki, TAKAO, Yoshinori

Language: Japanese

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7146715708

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