Year: 2026
Type: article
Abstract: This article explores tantalum nitride coatings obtained by vacuum arc deposition. The surface morphology of the coatings was investigated by scanning electron microscopy (SEM). The phase-structural state of the TaN coatings was studied by X-ray diffractometry. The equilibrium and metastable phases formed depend on the deposition conditions. The maximum microhardness of the TaN coatings is H = (20.2 ± 1.1) GPa and the maximum elastic modulus is E = (308.7 ± 10.3) GPa. The maximum value of Н3/Е2 ratio is 0.225, which indicates a high resistance of the coating to plastic deformation. The protective TaN coating due to high physico-mechanical properties is promising for deposition on various surfaces used in industry, electronics and medicine.
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W7155484792