Work

Dual-axis acoustically driven MEMS mirror enhanced by parallel double-layer Helmholtz resonator array

Year: 2026

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ae96b7

Authors: Masahiro Fukuta, Soya Sato, Hidetoshi Takahashi

Institutions: Keio University, National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Kawai Foundation for Sound Technology and Music

OpenAlex ID: W7201837663

FWCI:

Cites: 25

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Related to: 10