Research on an Electrostatic Tuning Method for Suppressing Stiffness Coupling Error of the MEMS Butterfly Gyroscope
Year: 2026
Type: conference-paper
Abstract: The performance demands for MEMS gyroscopes in UAVs and intelligent robotics are escalating. However, stiffness coupling errors induced by structural fabrication imperfections degrade the overall performance by coupling noise into the output signal. While traditional approaches such as structural design optimization and mechanical trimming fail to fully suppress these errors, electrostatic tuning, though effective, is largely confined to z-axis gyroscopes due to electrode fabrication constraints. To address this limitation in x/y-axis devices, this paper proposes an electrostatic tuning method based on distributed electrodes, utilizing a typical MEMS butterfly gyroscope as the research platform. By establishing a theoretical model of the proposed method, a tuning scheme was designed and implemented. Finite element simulations on the COMSOL platform were conducted to analyze the variation of stiffness coupling errors under electrostatic tuning, revealing the underlying influence mechanisms. Furthermore, a measurement and control circuit was designed to experimentally validate the suppression effect. By integrating a PID control strategy, real-time suppression of stiffness coupling errors was achieved. This work presents a viable solution for mitigating stiffness coupling and enhancing the performance of x/y-axis MEMS gyroscopes.
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W7201844490