Thermally-modulated dissipation dilution in 2D NEMS resonators with explicit model and temperature-stable damping
Year: 2026
Type: article
Abstract: Strain-diluted dissipation has emerged as a promising technique to modulate the quality ( Q ) factor of resonant nanoelectromechanical systems (NEMS). However, comprehensive understanding and precise control of this effect under varying temperatures have remained elusive. Here we investigate the temperature-modulated dissipation dilution mechanisms in two-dimensional (2D) NEMS resonators. We develop an explicit temperature-dependent dissipation dilution model highlighting the roles of thermally-induced strain and temperature fluctuations during vibration, which well captures experimental observations: with temperature increasing from 77 K to 355 K, Q factor in graphene resonators first decreases and then increases, while that in molybdenum disulfide (MoS 2 ) resonators monotonically decreases. Furthermore, based on the model, we design a graphene–MoS 2 heterostructure NEMS resonator with near-zero effective thermal expansion, which experimentally exhibits high temperature stability in both frequency and Q factor. Our results advance the understanding of dissipation dilution mechanisms and pave the way for developing thermally-stable resonant transducers and logic components.
Source: Microsystems & Nanoengineering
Institutions: Shanghai Jiao Tong University, ETH Zurich, University of Electronic Science and Technology of China, Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, State Key Laboratory of Electronic Thin Films and Integrated Devices
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $3,790
OpenAlex ID: W7202272801