Enhanced thermal robustness of laminated Hf0.5Zr0.5O2 ferroelectric film via Al2O3 mid-layer engineering
Year: 2026
Type: article
Source: Applied Surface Science
Institution: Sogang University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W7202356972
