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Development of a Wide-Angle Deep Ultraviolet Spectrophotometer Based on Photon-Counting Detection Mode of Photomultiplier Tube

Year: 2026

Type: article

Abstract: Spectral characterization in the deep ultraviolet (DUV) wavelengths plays a critical role for preparing the optical elements of DUV lithography. This paper reports on the development of a deep ultraviolet spectrophotometer based on the photon-counting method of the photomultiplier tube. The system adopts an all-reflective optical configuration, incorporating a vacuum ultraviolet deuterium lamp, a 300 gr/mm diffraction grating, and an M-type Czerny-Turner monochromator as the core unit. Spectral scanning from 175 to 300 nm with a spectral resolution of 0.1 nm is realized with the setup. A Hamamatsu R8486 photomultiplier tube is used for photon-counting detection of the light intensity. Polarization-resolved transmittance and reflectance measurements were realized with the setup in the 175–300 nm wavelength range.

Source: Advances in Engineering Technology Research

DOI: 10.56028/aetr.17.1.334.2026

Authors: Jiaheng Wang, Baoxing Xiong, Ziyi Ge, Xiang Zhang, Xiao Yuan, Cunding Liu

Institutions: Soochow University, Collaborative Innovation Center of Suzhou Nano Science and Technology, Key Lab of Modern Optical Technologies of Education Ministry of China

Language: English

Topic: Advanced optical system design

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W7203481209

FWCI:

Cites: 1

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Related to: 10