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Enhanced crystalline quality of reactive sputtered AlN thin films through sapphire nitridation and nitrogen-rich plasma engineering

Year: 2026

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/j.jcrysgro.2026.128814

Authors: Indrani Mazumder, Kashish Sapra, Gajander Singh Meena, Priyavart Parjapat, Rama Kant Sharma, Kuldip Singh

Institutions: Central Electronics Engineering Research Institute, Academy of Scientific and Innovative Research

Language: English

Topic: GaN-based semiconductor devices and materials

Subfield: Condensed Matter Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7204242567

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Cites: 16

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