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A Non-Coaxial Microwave Patch Sensor for Cutoff-Based Electron Density Measurement in ICP Plasmas

Year: 2026

Type: conference-paper

Source: IEEE International Conference on Plasma Science (ICOPS)

DOI: 10.1109/icops53334.2026.11660244

Authors: Jung-Hyung Kim, Gwang-Seok Chae, Hee Jung Yeom, Hyo-Chang Lee

Institutions: Korea Research Institute of Standards and Science, Korea Institute of Fusion Energy, Korea Aerospace University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7204537675

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