Work

Phenomenological Growth Regimes in Liquid-Precursor CVD of MoS$_2$ on Functional Substrates

Year: 2026

Type: preprint

Abstract: The integration of two-dimensional transition-metal dichalcogenides (TMDCs) onto functional substrates remains constrained by stochastic vapor-phase growth dynamics. Here, we show that liquid-phase precursor chemical vapor deposition (CVD) of MoS$_2$ introduces growth conditions that are consistent with a substrate-influenced reaction-diffusion process. By utilizing pre-growth spin-coated MoO$_3$ intermediates across a diverse crystalline library (sapphire, SrTiO$_3$, rutile TiO$_2$, MgO, and 6H-SiC), we find that substrate-dependent variations in precursor wetting, surface chemistry, and inferred mass-transport constraints correlate with distinct growth morphologies. These substrate-dependent growth regimes are interpreted in terms of reduced effective lateral growth length on SrTiO$_3$, possible precursor anchoring on TiO$_2$, likely chemical surface restructuring on MgO, and possible step-edge growth on SiC. Raman and photoluminescence spectroscopy reveal substrate-dependent variations in vibrational and optical response that correlate with differences in strain, charge environment, and dielectric screening. Ultimately, this work highlights a substrate-dependent reaction-diffusion framework as a potentially useful route for tuning the structural and optical properties of large-area 2D materials.

Source: arXiv (Cornell University)

DOI: 10.48550/arxiv.2608.28269

Authors: Kharsah, Osamah, Mouchel, Kilian, Liebsch, Yossarian, Sulaiman, Cathy, Verlande, Joel, Hierzenberger, Anke, Alghazali, Abdallah, Grygiel, Clara, Guillous, Stéphane, Lebius, Henning, Schleberger, Marika

Institutions: Centre National de la Recherche Scientifique, École Nationale Supérieure d'Ingénieurs de Caen, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Université de Caen Normandie, University of Duisburg-Essen, Centre de Recherche sur les Ions, les Matériaux et la Photonique

Topic: 2D Materials and Applications

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

Funders: Deutsche Forschungsgemeinschaft, Bundesministerium für Bildung und Forschung, Région Normandie

Awards: G3564447354, Konfokales Ramanmikroskop in Kombination mit einem Rastersondenmikroskop für korrelative Messungen, Kondensierte Materialien wie dünne Schichten oder Nanopartikel werden häufig in Gasphasensynthesen hergestellt. Kenntnisse über gebildete Wachstumsspezies sind für die Entwicklung von Reaktions- und Partikelbildungsmodellen unabdingbar und sollen mit Hilfe von Massenspektrometrie ermittelt werden., GRK 2803: Skalierbare 2D Material Architekturen (2DMATURE) Synthese und Prozessierung, Charakterisierung und Funktionalität, Implementierung und Demonstration

OpenAlex ID: W7204755781

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