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マルチフィジクスシミュレーションを用いた集積化cmos-mems技術のためのセンサ回路の検討

Year: 2013

Type: conference-paper

Source: Institutional Repositories DataBase (IRDB)

Authors: 小西, 敏文, 山根, 大輔, 松島, 隆明, 丸山, 智史, Maruyama, Satoshi, 加賀谷, 賢, Kagaya, Ken, 伊藤, 浩之, 石原, 昇, Ishihara, Noboru, 年吉, 洋, 町田, 克之, 益, 一哉

Language: Japanese

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7207985516

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