Work

Future Challenges in Semiconductor Cleaning

Year: 2026

Type: article

Source: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

DOI: 10.4028/p-k0nfpd

Authors: Kuntack Lee, Ji Hoon Cha, Hayoung Jeon, Seok Heo, Younghoo Kim, Ji Hoon Jeong, Seungmin Shin, Sangean Park, Sunghyun Park, Hyo San Lee, Hunjae Jang

Institution: Samsung Electronics (South Korea)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7224540657

FWCI:

Cites: 13

Cited by:

Related to: 10