Design and Fabrication of New Architectures for Surface Acoustic Wave Filters on Piezoelectric on Insulator Substrates
Year: 2026
Type: conference-paper
Abstract: Aiming at requirements located in the upper half of the S-band and the C-band, considering the L-band and the lower half of the S-band, the evolution of modern telecommunication standards like 5G imposes significant challenges on passive filters, particularly those based on SAW technology, which is extensively deployed in mobile communication systems. In particular, ultracompact filters are needed in the so-called Front-End Modules, including several bands in confined packages combining amplification, switching, and filtering functions. In this paper, we introduce an innovative type of resonator architecture particularly adapted to piezoelectric-on-insulator (POI) substrates devoted to radio-frequency operation. The paper presents an approach based on the combination of etched grooves and interdigitated transducers, yielding ultimately compact resonators that can be advantageously implemented in filters, as demonstrated in the dedicated section. We demonstrate that this approach allows taking advantage of all the remarkable features of SAW on POI, with improved filter characteristics.
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W7224928347