Work

Substrate Inspection Unit, Substrate Inspection Device including it, and Substrate Inspection Method using it

Year: 2007

Type: other

Source: MPG.PuRe (Max Planck Society)

Authors: HI Son, Yang Yi, CJ Jeon

Institutions: Max Planck Society, Max Planck Institute for Biological Cybernetics

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W777079562

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