Work

An ultrathick SU-8 UV lithographic process and sidewall characterization

Year: 2006

Type: conference-paper

Source: Elsevier eBooks

DOI: 10.1016/b978-008045263-0/50049-0

Authors: K. Jiang, C.-H. Lee, P. Jin

Institution: University of Birmingham

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W98016074

FWCI:

Cites: 20

Cited by: 4

Related to: 10