Year: 2000
Type: conference-paper
Abstract: We report here the design, fabrication and demonstration of an electrostatically actuated MEMS diffractive optical device, the Polychromator grating.The Polychromator grating enables a new type of correlation spectrometer for remote detection of a wide range of chemical species, offering electronic programmability, high specificity and sensitivity, fast response and ruggedness.Significant results include: (1) The first demonstrations of userdefined synthetic spectra in the 3 -5 pm wavelength regime based upon controlled deflection of individual grating elements in the Polychromator grating;(2) The first demonstration of gas detection by correlation spectroscopy using synthetic spectra generated by the Polychromator grating.Nevertheless, successful results have been obtained using this configuration.
Authors: G.B. Hocker, D. Youngner, E. Deutsch, A. Volpicelli, M. Butler, M. Sinclair, T. Plowman, A.J. Ricco, S. Senturia
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: hybrid
OpenAlex ID: W9901194