Author

Yoshihiro Mochizuki

Observed names: Y. Mochizuki, Yoshihiro MOCHIZUKI

Institution: Ebara (Japan)

Observed institutions: Shizuoka University, Ebara (Japan)

OpenAlex ID: A5007549653

Stress Analysis of Dielectrics Using FEM for Analyzing the Cause of Cracking Observed After W-CMP

2009 · Akira Fukuda, Yoshihiro Mochizuki, et al. · Journal of The Electrochemical Society · 56

PDF

Prediction of polishing pressure distribution in CMP process with airbag type wafer carrier

2017 · N. Suzuki, Y. Hashimoto, et al. · CIRP Annals · 36

PDF

Stress Corrosion Cracking of Cu Interconnects during CMP with a Cu/Porous Low-k Structure

2005 · Masako Kodera, Shin-ichiro Uekusa, et al. · Journal of The Electrochemical Society · 17

Material removal efficiency improvement by orientation control of CMP pad surface asperities

2019 · Norikazu Suzuki, Hirotaka Misono, et al. · Precision Engineering · 15

PDF

Novel method to visualize Preston’s coefficient distribution for chemical mechanical polishing process

2022 · Yohei Hashimoto, Tatsuaki Furumoto, et al. · Japanese Journal of Applied Physics · 10

PDF

Direct Teaching Method for Hybrid Control Applying Impedance Control.

1994 · Yoshihiro Mochizuki, Takashi Matsui · Journal of the Robotics Society of Japan · 7

PDF

Process state estimation in chemical mechanical polishing (CMP) by inverse analysis of in-process data

2022 · N. Suzuki, R. Yamaguchi, et al. · CIRP Annals · 6

Study on Material Removal Phenomena in CMP Process

2011 · Keiichi Kimura, Yuichi Hashiyama, et al. · 6

Stress Analyses during Chemical Mechanical Planarization Processing with Cu/Porous Low-k Structures of LSI Devices

2005 · Masako Kodera, Akira Fukuda, et al. · Japanese Journal of Applied Physics · 6

Effect of Positive Angular Velocity Feedback on Torque Control of Hydraulic Actuator.

1991 · Takashi MATSUI, Yoshihiro MOCHIZUKI · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C · 6

PDF

Shear Stress Analyses in Chemical Mechanical Planarization with Cu/Porous Low-k Structure

2007 · Masako Kodera, Yoshihiro Mochizuki, et al. · Japanese Journal of Applied Physics · 5

A study on simulation of a water-hydraulic system for a molding press.

2002 · Kazushi SANADA, Makoto FUKUTOMI, et al. · TRANSACTIONS OF THE JAPAN FLUID POWER SYSTEM SOCIETY · 4

PDF

Effect of Positive Angular Velocity Feedback on Torque Control of Hydraulic Actuator.

1992 · Takashi MATSUI, Yoshihiro MOCHIZUKI · JSME international journal Ser 3 Vibration control engineering engineering for industry · 4

PDF

Study on evaluation method for polishing pad surface topography based on optical fourier transform

2014 · Panart Khajornrungruang, Keisuke Suzuki, et al. · International Conference on Planarization/CMP Technology (ICPT) · 1

Characterization of Residual Stress Change of Dielectrics in W-CMP Process Using Finite Element Method Analysis

2011 · Akira Fukuda, Yoshihiro Mochizuki, et al. · 1

21703 Effect of CMP variation on effective dielectric constant of interconnect structures

2007 · Masashi Shimoyama, Yoshihiro Mochizuki, et al. · The Proceedings of Conference of Kanto Branch · 1

PDF

20115 Stress analysis of low-k material interface during CMP

2006 · Yoshihiro Mochizuki, Hideki Shibata, et al. · The Proceedings of Conference of Kanto Branch · 1

Adaptive Impedance Control Subject to Torque Constraints in a Hydraulic Robot.

1993 · Yoshihiro Mochizuki, Takashi Matsui, et al. · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C · 1

PDF

A Design of Two-Degree-of-Freedom Digital Controller for Hydraulic Servo Systems. Numerical Investigation for Discretization of Analogue Controller.

1991 · Yoshihiro MOCHIZUKI, Takashi MATSUI · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C · 1

PDF

A New Method to Analyse Vibrations of Resonators by the Combination of Plate Equations and Finite Element Method

1978 · Y. Mochizuki · Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) · 1

Study on evaluation method for surface topography of polishing pad based on optical Fourier transform

2015 · Keisuke Suzuki, Takahiro Tajiri, et al.

Shear Stress Analyses in Chemical Mechanical Planarization Processing with Cu/porous low-k Structure

2007 · Masako Kodera, Yoshihiro Mochizuki, et al. · International Conference on Solid State Devices and Materials (SSDM)

21706 Finite element method analysis of residual stress changes in inter-metal dielectrics by CMP process

2007 · Akira FUKUDA, Yoshihiro Mochizuki, et al. · The Proceedings of Conference of Kanto Branch

PDF

20101 Stress Analyses in CMP Processing with Cu/low-k Structure

2006 · Masako Kodera, Akira Fukuda, et al. · The Proceedings of Conference of Kanto Branch

PDF

20705 FEM Aalysis of the maximum stress in vias with the damascene structure

2005 · Yoshihiro Mochizuki, Hideki Shibata, et al. · The Proceedings of Conference of Kanto Branch

PDF

Works count: 26

Citation count: 185

H-index: 6

I10-index: 5