Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
Peng Zhang
Observed names:
P. ZHANG,
P. Zhang,
PENG ZHANG,
Peng ZHANG
Institution:
Tongling University
Observed institutions:
Changchun University of Science and Technology,
University of Science and Technology of China,
China National Offshore Oil Corporation (China),
Yangtze Normal University,
Tongling University,
Huazhong University of Science and Technology
show all 6
ORCID:
0000-0002-8029-1041
Observed ORCID:
0000-0002-8029-1041
OpenAlex ID:
A5008440404
Study on the influence of electron angular distribution on mask pattern damage in plasma etching
2020
·
Peng Zhang
, Lidan Zhang
, et al.
·
Plasma Processes and Polymers
·
30
Charging Effect in Plasma Etching Mask of Hole Array
2013
·
Peng Zhang
, Jun Wang
, et al.
·
Plasma Science and Technology
·
24
Relationship between edge roughness in mask pattern and charging in plasma etching
2019
·
Peng Zhang
·
Plasma Processes and Polymers
·
21
Exploring the Effects of Placement and Electron Angular Distribution on Two Adjacent Mask Holes During Plasma Etching Process
2020
·
Peng Zhang
, Lidan Zhang
, et al.
·
Plasma Chemistry and Plasma Processing
·
13
Monte Carlo study on the temperature rise under electron irradiation
2020
·
Peng Zhang
, Lidan Zhang
·
International Journal of Heat and Mass Transfer
·
13
Exploring the evolution of asymmetric pattern of mask hole during plasma etching process by particle simulation method
2019
·
Peng Zhang
·
Results in Physics
·
12
PDF
Monte Carlo study of the effective electron beam shape in scanning electron microscopic imaging
2015
·
Peng Zhang
, Shifeng Mao
, et al.
·
The European Physical Journal Applied Physics
·
11
Exploring the temperature rise under low-energy electron irradiation for various materials
2020
·
Peng Zhang
, Lidan Zhang
·
International Journal of Thermal Sciences
·
10
The influence of sample temperature on SEM contrast of two types of nanostructures
2023
·
Peng Zhang
·
Applied Physics A
·
9
Exploring the Influence of a Focusing and Gaussian Profile Electron Beam in SEM Imaging through Monte Carlo Simulation
2018
·
P. Zhang
·
Moscow University Physics Bulletin
·
8
Monte Carlo Study on Electron Emission from Dielectric Materials
2017
·
P. Zhang
·
Journal of Computational and Theoretical Transport
·
8
The modification of roughness to corner effect in plasma etching
2023
·
Peng Zhang
·
Physica Scripta
·
7
Competitive effect between roughness and mask pattern on charging phenomena during plasma etching
2022
·
Peng ZHANG
, Ruvarashe F DAMBIRE
·
Plasma Science and Technology
·
7
Charging Effect in Basic and Complex Mask Patterns During Plasma Etching
2022
·
Peng Zhang
, Dengmei Li
·
Plasma Chemistry and Plasma Processing
·
6
Exploring the heat transfer for spherical nanoparticles under electron irradiation
2021
·
Peng Zhang
, Lidan Zhang
, et al.
·
Physica Scripta
·
6
Study on abnormal SEM contrast image of gold nanorods through Monte Carlo method
2018
·
Peng Zhang
·
The European Physical Journal Applied Physics
·
6
The features of surface charging on rectangle mask holes in plasma etching
2022
·
Peng Zhang
, Dengmei Li
·
Physics of Plasmas
·
5
Study on the Heat Generation during Electron Irradiation for Two Specific Nanostructures
2021
·
Peng Zhang
·
Moscow University Physics Bulletin
·
5
Relation Between Electron Yield and Temperature: Exploring a Novel Route to Measure the Nanoscale Temperature
2023
·
Peng Zhang
, Zhiyao Ma
, et al.
·
Brazilian Journal of Physics
·
4
Interplay between charging and roughness on two adjacent mask holes during plasma etching
2021
·
Peng Zhang
, Lidan Zhang
, et al.
·
Physics of Plasmas
·
4
Thermal effect of two adjacent nanospheres during electron irradiation
2022
·
Peng Zhang
·
Physica B Condensed Matter
·
3
Study on the Pulse Phase Lag Effect on Two Mask Holes During Plasma Etching
2021
·
Peng Zhang
·
Brazilian Journal of Physics
·
3
Study on the influence of ion incident energy on surface charging in plasma etching
2021
·
Peng Zhang
·
Physica Scripta
·
2
Relations between electron yield and temperature rise under low‐energy electron irradiation for Au element
2020
·
P. ZHANG
, L.D. ZHANG
·
Journal of Microscopy
·
2
PDF
Monte Carlo study for correcting the broadened line‐scan profile in scanning electron microscopy
2019
·
P. ZHANG
·
Journal of Microscopy
·
2
Show more works
View as search
Works count:
45
Citation count:
229
H-index:
9
I10-index:
8
Year
Topic
Type
