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Author

Takashi Miyawaki

Observed name: ミヤワキ, タカシ
Institution: Nikon (Japan)
Observed institution: Nikon (Japan)
ORCID: 0000-0001-7927-2057
Observed ORCID: 0000-0001-7927-2057
OpenAlex ID: A5017240160
Optical path length self-calibration method based on form measured surface data
2022 · Takashi Miyawaki, Katsuyoshi Endo · Precision Engineering · 4
Simultaneous measurement of fine pattern shape and overall shape by a nano-profiler
2022 · Takashi Miyawaki, Katsuyoshi Endo · Review of Scientific Instruments · 1
On-machine self-calibration of rotary encoders in the normal vector tracing method
2022 · Takashi Miyawaki, Tsukasa Watanabe, et al. · Review of Scientific Instruments · 1
Reduction of motion axis by sensitivity calibration of sensor in shape measurement instrument using normal vector tracing
2023 · Takashi Miyawaki, Mikiya Ikuchi, et al. · Review of Scientific Instruments
Cylindrical surface shape measurement method and measurement comparison
2022 · Takashi Miyawaki, Katsuyoshi Endo · Optical Engineering
Spiral scanning nano-profiler using normal vector tracing method
2022 · Takashi Miyawaki, Katsuyoshi Endo · Review of Scientific Instruments
Works count: 7
Citation count: 6
H-index: 1
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