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Daniel C. Wack
Observed names:
D. C. Wack,
D. Wack,
D.C. Wack,
Daniel Wack
Institution:
KLA (United States)
Observed institutions:
General Electric (United States),
Cornell University,
Cornell High Energy Synchrotron Source,
KLA (United States)
OpenAlex ID:
A5020378103
Depth-Controlled Grazing-Incidence Diffraction of Synchrotron X Radiation
1986
·
H. Dosch
, B. W. Batterman
, et al.
·
Physical Review Letters
·
178
Synchrotron x-ray study of the modulated lamellar phase Pβ’ in the lecithin-water system
1989
·
Daniel C. Wack
, Watt W. Webb
·
Physical Review A
·
121
Phonon Dominated Heat Conduction Normal to Mo/Si Multilayers with Period below 10 nm
2012
·
Zijian Li
, Si Tan
, et al.
·
Nano Letters
·
67
High temperature thermal properties of thin tantalum nitride films
2011
·
Elah Bozorg-Grayeli
, Zijian Li
, et al.
·
Applied Physics Letters
·
47
Measurements of Modulated Lamellar Pβ′ Phases of Interacting Lipid Membranes
1988
·
Daniel C. Wack
, Watt W. Webb
·
Physical Review Letters
·
44
Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics
2012
·
Elah Bozorg-Grayeli
, Zijian Li
, et al.
·
Journal of Applied Physics
·
24
Measurement by x-ray diffraction methods of the layer compressional elastic constantBin the lyotropic smectic-A( Lα ) phase of the lecithin-water system
1989
·
Daniel C. Wack
, Watt W. Webb
·
Physical Review A
·
24
First-principles calculations of the dielectric properties of silicon nanostructures
2008
·
S. Hamel
, A. J. Williamson
, et al.
·
Applied Physics Letters
·
22
A noise equivalent counts approach to transmission imaging and source design
1993
·
C.W. Stearns
, D.C. Wack
·
IEEE Transactions on Medical Imaging
·
11
Source performance metrics for EUV mask inspection
2022
·
Larissa Juschkin
, Daniel C. Wack
·
Journal of Micro/Nanopatterning Materials and Metrology
·
7
PDF
EUV mask inspection with 193 nm inspector for 32 and 22 nm HP
2010
·
Daniel Wack
, Qiang Q. Zhang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Dark-field optical scatterometry for line-width-roughness metrology
2009
·
G. Vera Zhuang
, Steven Spielman
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
4
A noise equivalent counts approach to transmission imaging and source design
2002
·
C.W. Stearns
, D.C. Wack
·
IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)
·
4
Opportunities and challenges for optical CD metrology in double patterning process control
2008
·
Daniel C. Wack
, John Hench
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Simulation and measurement of spatial resolution in detection of annihilation radiation with BGO crystals
2005
·
D. McDaniel
, B.D. Johnston
, et al.
·
IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)
·
2
Mask inspection technologies for 22nm HP and beyond
2010
·
Daniel Wack
, Qiang Q. Zhang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
1
Performance Study Of Multi-slice Whole-body PET Scanners
2005
·
D.C. Wack
·
IEEE Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC)
·
1
Modulations and Fluctuations in Lyotropic Smectic Liquid Crystals.
1989
·
Daniel Wack
·
PhDT
Depth-Profiling of Near-Surface Atomic Correlations by Total Reflection of Synchrotron Radiation
1986
·
H. Dosch
, D. C. Wack
, et al.
·
MRS Proceedings
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Works count:
19
Citation count:
567
H-index:
9
I10-index:
9
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