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Hironori Moki

Observed name: Moki, Hironori
ORCID: 0009-0006-6476-3359
Observed ORCID: 0009-0006-6476-3359
OpenAlex ID: A5025039861
Machine Learning Approaches for Process Optimization
2018 · Yusuke Suzuki, Shinya Iwashita, et al. · IEEE International Symposium on Semiconductor Manufacturing conference proceedings · 14
Precise and practical 3D topography simulation of high aspect ratio contact hole etch by using model optimization algorithm
2024 · Tetsuya Nishizuka, Ryo Igosawa, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 7
Optimization of uniformity in plasma ashing process using genetic programming
2023 · Tsuyoshi Moriya, Yusuke Suzuki, et al. · Journal of Physics D Applied Physics · 1
Seasoning Optimization by Using Optical Emission Spectroscopy
2020 · Masahiro Shiga, Haruki Omine, et al. · IEEE International Symposium on Semiconductor Manufacturing conference proceedings · 1
Cross-Machine Anomaly Detection Leveraging Pre-trained Time-series Model
2026 · Li, Yangmeng, Sano, Kei, et al. · arXiv (Cornell University)
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Data-Driven Yield Estimation and Maximization Using Bayesian Optimization Under Uncertainty
2026 · Kei Sano, Daiki Kawahito, et al. · Applied Sciences
The next generation way of the process control of the atomic layer deposition
2019 · Tadashi Mitsunari, Toshiki Sato, et al. · The Japan Society of Applied Physics
Works count: 7
Citation count: 23
H-index: 2
I10-index: 1
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