Author

Richard Wollrab

2005 · M. Walther, R. Rehm, et al. · Journal of Electronic Materials · 47
1989 · R Wollrab, R Sizmann, et al. · Semiconductor Science and Technology · 43
2003 · Heinrich Figgemeier, Martin Bruder, et al. · Journal of Electronic Materials · 22
2014 · H. Lutz, R. Breiter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 18
2014 · J. Ziegler, J. Wenisch, et al. · Journal of Electronic Materials · 18
2012 · J. Wenisch, D. Eich, et al. · Journal of Electronic Materials · 18
2011 · H. Lutz, R. Breiter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 14
2011 · R. Wollrab, A. Bauer, et al. · Journal of Electronic Materials · 14
2014 · W. Schirmacher, R. Wollrab, et al. · Journal of Electronic Materials · 13
2015 · J. Wenisch, W. Schirmacher, et al. · Journal of Electronic Materials · 11
2014 · Marco Vallone, Michele Goano, et al. · Journal of Electronic Materials · 11
2013 · J. Wenisch, H. Bitterlich, et al. · Journal of Electronic Materials · 11
2011 · J. Ziegler, D. Eich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
1992 · J. H. Chu, Z. Y. Mi, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 8
2013 · J. Ziegler, H. Bitterlich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
2002 · J Ziegler, M Bruder, et al. · Infrared Physics & Technology · 7
2009 · S. Hanna, A. Bauer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
2008 · K.-M. Mahlein, A. Bauer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
2012 · J. Wenisch, D. Eich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
2010 · S. Hanna, A. Bauer, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
2010 · J. Wenisch, D. Eich, et al. · Journal of Electronic Materials · 4
2010 · J. Ziegler, D. Eich, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
2002 · Johann Ziegler, Martin Bruder, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
2007 · M. Haiml, M. Bruder, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
2000 · Wolfgang A. Cabanski, Rainer Breiter, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2
Works count: 35
Citation count: 310
H-index: 11
I10-index: 12
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