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Sergey D. Poletayev
Observed names:
Poletayev S. D.,
S. D. Poletayev,
S.D. Poletayev,
Sergey D Poletayev,
Sergey D. Poletaev
Institutions:
Kurchatov Institute,
Samara National Research University,
Image Processing Systems Institute
Observed institutions:
Russian Academy of Sciences,
Kurchatov Institute,
Samara National Research University,
Samara Federal Research Scientific Center,
Image Processing Systems Institute,
Federal Scientific Research Centre Crystallography and Photonics,
Samara State University
show all 7
ORCID:
0000-0003-3581-1316
Observed ORCID:
0000-0003-3581-1316
OpenAlex ID:
A5032900762
Microprofile formation by thermal oxidation of molybdenum films
2016
·
N. L. Kazanskiy
, O. Yu. Moiseev
, et al.
·
Technical Physics Letters
·
70
Thermal oxidative degradation of molybdenum films under laser ablation
2015
·
A. V. Volkov
, N. L. Kazanskiy
, et al.
·
Technical Physics
·
28
Numerical simulation of the ablation of thin molybdenum films under laser irradiation
2016
·
N. L. Kazanskiy
, S. D. Poletayev
·
Technical Physics
·
13
Specific features of the laser irradiation of thin molybdenum films
2016
·
A. V. Volkov
, N. L. Kazanskiy
, et al.
·
Technical Physics
·
10
Laser ablation of thin films of molybdenum for the fabrication of contact masks elements of diffractive optics with high resolution
2015
·
Sergey D. Poletaev
·
International Conference on Information Technology and Nanotechnology (ITNT)
·
5
PDF
Vector Beams with Only Transverse Intensity at Focus
2023
·
Sergey S. Stafeev
, Nikita N. Kazakov
, et al.
·
Applied Sciences
·
3
PDF
Specific Features of Matching of a Lower Electrode and an RF Bias Generator for Reactive Ion Etching of Bulk Substrates
2021
·
S. D. Poletayev
, A. I. Lyubimov
·
Technical Physics
·
3
Reactive ion etching of indium-tin oxide films by CCl4-based Inductivity Coupled Plasma
2016
·
Sucheta Juneja
, Sergey D Poletayev
, et al.
·
Journal of Physics Conference Series
·
3
PDF
Effect of Changes in Thermophysical Properties of Molybdenum Thin Films on Laser Ablation Process
2022
·
S. D. Poletayev
·
Optoelectronics Instrumentation and Data Processing
·
1
The Influence of Metal Masks on Matching of the Lower Electrode and a High-Frequency Bias Generator at Reactive Ion Etching of Large Substrates
2021
·
S. D. Poletayev
, A. I. Lyubimov
·
Technical Physics Letters
·
1
Deposition of Zinc Oxide thin film layer with the help of modified sputtering system
2017
·
Sergey A. Fomchenkov
, Sergey D. Poletaev
·
International Conference on Information Technology and Nanotechnology (ITNT)
·
1
PDF
The Efficiency of Optical Microstructures Formed on Molybdenum Films
2016
·
Sergey D. Poletayev
, Sergey G. Volotovsky
·
International Conference on Information Technology and Nanotechnology (ITNT)
·
1
PDF
Investigation of the Radiation Resistance of Diffraction Gratings Produced by Direct Laser Writing in the ZrO2 Layer
2026
·
S. D. Poletayev
, A. I. Lyubimov
·
Optical Memory and Neural Networks
Formation of Nanogap Matrix on Chromium Film by Direct Laser Writing: First Results
2026
·
S. D. Poletayev
, N. V. Golovastikov
·
Optical Memory and Neural Networks
High-resolution laser recording on metal and oxide films
2025
·
S. D. Poletayev
, S. A. Savelyev
·
Optical and Quantum Electronics
Investigation of the Effect of the Formation of Subwavelength Microcylinders in the Process of Pulsed Laser Action on the Cr/ZrO2 Bilayer
2025
·
S. D. Poletayev
, D. A. Savelyev
, et al.
·
Optical Memory and Neural Networks
Effect of Discharge Power in a Plasma during Reactive-Ion Etching of Massive Substrates on the Matching of the Lower Electrode with a High-Frequency Bias Generator
2022
·
S. D. Poletayev
·
Russian Microelectronics
Influence of Changes in the Thermophysical Properties of Molybdenum Thin Films on the Laser Ablation Process
2022
·
S.D. Poletayev
·
Optoelectronics Instrumentation and Data Processing
Influence of the asymmetry of the metal mask arrangement on the matching of the lower electrode with a high-frequency displacement generator during reactive-ion etching of massive substrates
2022
·
Poletayev S. D.
, Lyubimov A. I.
·
Физика и техника полупроводников
PDF
The research of the properties of thin films of molybdenum to form the contact masks for diffractive optics elements
2015
·
Sergey D. Poletaev
·
International Conference on Information Technology and Nanotechnology (ITNT)
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Works count:
20
Citation count:
139
H-index:
5
I10-index:
4
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