1973 · W. Oldham, S. Cserveny, et al. · Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference · 5

Silica deposition by excimer-laser-induced chemical vapour deposition in perpendicular configuration

1996 · Betty León, Armin Klumpp, et al. · Advanced Materials for Optics and Electronics · 3

New controlled avalanche structure

1970 · H. Sigmund, M. Hetzelt · Solid-State Electronics · 2

All-dry siloxane based resist system: Plasmainduced chemical vapor deposition and reactive ion etch development

1994 · A. Klumpp, E. Hacker, et al. · Microelectronic Engineering

Selective crystallization of silicon layers without seeding and capping layer

1989 · C. Stumpff, H. Sigmund · Applied Surface Science

Low Temperature Interlevel SiO2 Layers by Photoinduced Processing

1989 · H. Sigmund, A. Klumpp, et al. · MRS Proceedings

Laser-Induced Formation Of SiO2-Layers For Microelectronics

1988 · H. Sigmund · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Investigation of silicon materials for solar cells. Part 1: Segregation and gettering properties of certain contaminations. Part 2: Measurement of electrical parameters

1983 · H. Sigmund, H. Bernt

ChemInform Abstract: SOLUBILITIES OF MAGNESIUM AND CALCIUM IN SILICON

1983 · H. SIGMUND · ChemInform

Fabrication of a semiconductor radiation detector

1970 · Ingolf Rüge, H. Sigmund · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

Technological applications of heterojunctions

1968 · Klaus Berchtold, Ingolf Rüge, et al. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

Works count: 23

Citation count: 206

H-index: 8

I10-index: 8