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Hans van der Laan
Observed names:
H. Van Der Laan,
H. v. d. Laan,
H. van der Laan,
Hans Van Der Laan,
Laan, H. van der,
van der Laan, Hans
show all 6
Observed institutions:
ASM International (Netherlands),
ASML (Netherlands)
OpenAlex ID:
A5044185636
Aerial image measurement methods for fast aberration set-up and illumination pupil verification
2001
·
Hans van der Laan
, Marcel Dierichs
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
42
High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements
2013
·
Jan Mulkens
, Michael Kubis
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
24
Understanding systematic and random CD variations using predictive modeling techniques
1999
·
Donis G. Flagello
, Hans van der Laan
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
22
Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing.
2013
·
Jos Benschop
, Andre Engelen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
20
Le nombre plastique : quinze leçons sur l'ordonnance architectonique
1960
·
Hans van der Laan
, Xavier Botte
·
Leiden : Brill eBooks
·
13
Etch, reticle, and track CD fingerprint corrections with local dose compensation
2005
·
Hans van der Laan
, Rene Carpaij
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
10
Study of iso-dense bias (IDB) sensitivity to laser spectral shape at the 45nm node
2007
·
Kazuyuki Yoshimochi
, Takayuki Uchiyama
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
8
BlueSky: Physical Access Control: Characteristics, Challenges, and Research Opportunities
2022
·
Amirreza Masoumzadeh
, Hans van der Laan
, et al.
·
ACM Symposium on Access Control Models and Technologies (SACMAT)
·
7
New approaches in diffraction based optical metrology
2016
·
M. Ebert
, P. Vanoppen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Driving imaging and overlay performance to the limits with advanced lithography optimization
2012
·
Jan Mulkens
, Jo Finders
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Focus drilling for increased process latitude in high-NA immersion lithography
2011
·
Ivan Lalovic
, Jason Lee
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Application of the aberration ring test (ARTEMIS) to determine lens quality and predict its lithographic performance
2001
·
Marco H. P. Moers
, Hans van der Laan
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Reducing the overlay metrology sensitivity to perturbations of the measurement stack
2017
·
Yue Zhou
, DeNeil Park
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
5
The Play of Forms
2005
·
Hans van der Laan
, Richard Padovan
·
BRILL eBooks
·
5
A scatterometry-based CD uniformity control solution for Spacer Patterning Technology
2012
·
Peter ten Berge
, Hyosang Kang
, et al.
·
4
An integrated approach to holistic metrology qualification for multi-patterning process layers: AM: Advanced metrology
2016
·
Emil Schmitt-Weaver
, Lotte Willems
, et al.
·
ASMC proceedings
·
3
Experimental proximity matching of ArF scanners
2008
·
Joost Bekaert
, L. Van Look
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Utilization of Insitu Metrology Capability of ASML Lithography Scanner to Improve Overall Process Control
2006
·
Alek Chen
, Mircea Dusa
, et al.
·
IEEE International Symposium on Semiconductor Manufacturing conference proceedings
·
3
L'espace architectonique : quinze leçons sur la disposition de la demeure humaine
1989
·
Hans van der Laan
, Xavier Botte
·
BRILL eBooks
·
3
Focus and exposure dose determination using stepper alignment
1996
·
Peter Dirksen
, Rudy J. M. Pellens
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Scatterometry based 65nm node CDU analysis and prediction using novel reticle measurement technique
2005
·
Koen van Ingen Schenau
, Peter Vanoppen
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
1
Dom Hans van der Laan : le opere, gli scritti
2001
·
Alberto Ferlenga
, P. Verde
, et al.
·
AirIuav (Università Iuav di Venezia)
·
1
Der architektonische Raum : fünfzehn Lektionen über die Disposition der menschlichen Behausung
1992
·
Hans van der Laan
·
1
Robustness and organ sparing potential of intensity modulated proton therapy for oesophageal cancer
2018
·
R. Melissa Anakotta
, Hans van der Laan
, et al.
Dom Hans van der Laan. Der Architekt und Benediktinermönch suchte nach universellen Prinzipien in der Architektur
2015
·
Caroline Voet
, Hans van der Laan
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Works count:
41
Citation count:
203
H-index:
7
I10-index:
6
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