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Kazuki Denpoh

Observed names: Denpoh Kazuki, K Denpoh, K. Denpoh, Kazuki DENPOH, Kazuki Denpoh Kazuki Denpoh
ORCID: 0000-0003-2474-8198
Observed ORCID: 0000-0003-2474-8198
OpenAlex ID: A5045977628
Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions
1998 · Kazuki Denpoh, Kenichi Nanbu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 123
Self-Consistent Particle Simulation of Radio Frequency CF 4 Discharge: Effect of Gas Pressure
2000 · Kazuki Denpoh Kazuki Denpoh, Kenichi Nanbu Kenichi Nanbu · Japanese Journal of Applied Physics · 82
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Monte Carlo Collision Simulation of Positive-Negative Ion Recombination for a Given Rate Constant
1998 · Kenichi Nanbu, Kazuki Denpoh · Journal of the Physical Society of Japan · 41
Modeling of rarefied gas heat conduction between wafer and susceptor
1998 · K. Denpoh · IEEE Transactions on Semiconductor Manufacturing · 40
Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled plasmas in argon
2008 · K. Denpoh, P. L. G. Ventzek · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 37
Multiscale plasma and feature profile simulations of plasma-enhanced chemical vapor deposition and atomic layer deposition processes for titanium thin film fabrication
2019 · Kazuki Denpoh, Paul Moroz, et al. · Japanese Journal of Applied Physics · 25
Computational study on silicon oxide plasma enhanced chemical vapor deposition (PECVD) process using tetraethoxysilane/oxygen/argon/ helium
2019 · Hu Li, Hisashi Higuchi, et al. · Japanese Journal of Applied Physics · 23
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Sheath Model for Dual-Frequency Capacitively Coupled Plasmas
2004 · Kazuki Denpoh, Go Wakayama, et al. · Japanese Journal of Applied Physics · 21
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Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed utilizing COMSOL Multiphysics
2014 · Kazuki Denpoh · Japanese Journal of Applied Physics · 18
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Particle-in-Cell/Monte Carlo Collision Simulations of Striations in Inductively Coupled Plasmas
2012 · Kazuki Denpoh · Japanese Journal of Applied Physics · 18
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Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled CF4 plasmas
2009 · P. L. G. Ventzek, K. Denpoh · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 16
Locally enhanced discharges at gas hole outlets of a showerhead in a plasma etching reactor
2008 · K Denpoh · Journal of Physics D Applied Physics · 14
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Comprehensive ion-molecule reactive collision model for processing plasmas
2022 · Kazuki Denpoh, Kenichi Nanbu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 13
Effects of driving frequency on plasma density in Ar and H 2 /Ar capacitively coupled plasmas at Torr-order pressure
2020 · Kazuki Denpoh · Japanese Journal of Applied Physics · 12
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Dissociative reactions induced by electron impact and electron transport in TEOS vapor
2019 · Satoru Kawaguchi, Hisashi Higuchi, et al. · Japanese Journal of Applied Physics · 12
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Impact of ion energies in Ar/H2 capacitively coupled radio frequency discharges on PEALD processes of titanium films
2018 · Shinya Iwashita, Kazuki Denpoh, et al. · Surface and Coatings Technology · 10
Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet
2004 · Tsuyoshi Moriya, Hiroshi Nagaike, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 10
Understanding plasma enhanced chemical vapor deposition mechanisms in tetraethoxysilane-based plasma
2023 · Hu Li, Koichi Ishii, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 9
Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films
2018 · Shinya Iwashita, Kazuki Denpoh, et al. · Thin Solid Films · 8
Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: Incorporating Ion Density Oscillation at Low Frequency
2010 · Kazuki Denpoh, Tatsuru Shirafuji · Japanese Journal of Applied Physics · 7
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Semianalytical Finite Element Method Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas
2009 · Kazuki Denpoh, Tatsuru Shirafuji · Japanese Journal of Applied Physics · 5
Quantitative analysis of plasma-enhanced chemical vapor deposition mechanisms: Quantum chemical and plasma-fluid dynamics investigation on tetraethoxysilane/O2 plasma
2024 · Hu Li, Kazuki Denpoh · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 4
Numerical strategy for solving the Boltzmann equation with variable E/N using physics-informed neural networks
2023 · Jin Seok Kim, Kazuki Denpoh, et al. · Journal of Physics D Applied Physics · 4
Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface
2011 · Kazuki Denpoh, Tatsuru Shirafuji · Japanese Journal of Applied Physics · 4
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Theoretical Study on the Angular Distribution of Molecular Flux Effusing into a Vacuum.
1993 · Kenichi Nanbu, Kazuki Denpoh · TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B · 4
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Works count: 42
Citation count: 575
H-index: 13
I10-index: 17
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