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James M. Oberschmidt

Ionic conductivity, activation volumes, and high-pressure phase transitions in Pb F2 and Sr Cl2
1980 · J. Oberschmidt, D. Lazarus · Physical review. B, Condensed matter · 79
Ionic conductivity, activation volumes, and frequency-dependent conductivity in crystals with the fluorite structure
1980 · J. Oberschmidt, D. Lazarus · Physical review. B, Condensed matter · 73
Simple thermodynamic model for the specific-heat anomaly and several other properties of crystals with the fluorite structure
1981 · J. Oberschmidt · Physical review. B, Condensed matter · 58
High-performance sub-0.08 μm CMOS with dual gate oxide and 9.7 ps inverter delay
2002 · M. Hargrove, S. Crowder, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 45
Nuclear Quadrupole Interactions at Te125 in the Isoelectronic Crystalline Hosts of S, Se, and Te
1973 · P. Boolchand, T. Henneberger, et al. · Physical Review Letters · 45
Grain-boundary diffusion in some Pb-Sn alloys
1982 · J. Oberschmidt, K. K. Kim, et al. · Journal of Applied Physics · 44
A high-performance sub-0.25 μm CMOS technology with multiple thresholds and copper interconnects
2002 · L. Su, R. Schulz, et al. · Symposium on VLSI Technology · 26
Alternating phase-shifted mask for logic gate levels, design, and mask manufacturing
1999 · Lars W. Liebmann, Ioana C. Graur, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 22
Low-inductance decoupling capacitor for the thermal conduction modules of the IBM Enterprise System/9000 processors
1992 · J. N. Humenik, J. M. Oberschmidt, et al. · IBM Journal of Research and Development · 22
Improving yield through the application of process window OPC
2009 · Jaione Tirapu Azpiroz, Azalia Krasnoperova, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 21
New ESCAP-type resist with enhanced etch resistance and its application to future DRAM and logic devices
1997 · Will Conley, William R. Brunsvold, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 14
Automation of sample plan creation for process model calibration
2010 · James Oberschmidt, Amr Abdo, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 13
Challenges of implementing contour modeling in 32nm technology
2008 · Daniel Fischer, Geng Han, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 13
A low inductance capacitor technology
2002 · J.M. Oberschmidt, J.N. Humenik · IEEE Electronic Components and Technology Conference (ECTC) · 13
Performance of a wide-field flux delivery system for synchrotron x-ray lithography
1993 · J. P. Silverman, C. N. Archie, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 12
The effect of OPC optical and resist model parameters on the model accuracy, run time, and stability
2006 · Amr Abdo, Rami Fathy, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 10
Failure prediction across process window for robust OPC
2003 · Shumay D. Shang, Yuri Granik, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 10
X-ray induced mask contamination and particulate monitoring in x-ray steppers
1996 · C. Capasso, A. Pomerene, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 9
Effect of Frenkel defects on the high-pressure phase transitions in Pb F2 and Sr Cl2
1981 · J. Oberschmidt · Physical review. B, Condensed matter · 9
Automated sample plan selection for OPC modeling
2014 · Nathalie Casati, Maria Gabrani, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
X-ray lithography beamlines in the IBM Advanced Lithography Facility
1993 · J. P. Silverman, R. P. Rippstein, et al. · IBM Journal of Research and Development · 6
Installation and early operating experience with the Helios compact synchrotron x-ray source
1992 · C. N. Archie, J. I. Granlund, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 6
Model-based calculation of weighting in OPC model calibration
2006 · Mohamed Talbi, Amr Abdo, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
The effect of calibration feature weighting on OPC optical and resist models: investigating the influence on model coefficients and on the overall model fitting
2005 · Amr Abdo, Rami Fathy, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Observation of Natural Linewidth for the 35.5-keV γ Resonance in Te125
1973 · J. Oberschmidt, P. Boolchand · Physical review. B, Solid state · 5
Works count: 40
Citation count: 604
H-index: 13
I10-index: 17
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