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Houssam Chouaib

Photoreflectance spectroscopy for the study of GaAsSb/InP heterojunction bipolar transistors
2003 · C. Bru-Chevallier, H. Chouaib, et al. · Thin Solid Films · 24
Nanoscale optical critical dimension measurement of a contact hole using deep ultraviolet spectroscopic ellipsometry
2012 · Houssam Chouaib, Qiang Zhao · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 16
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Mueller matrix spectroscopy and physics-based machine learning for gate-all-around sheet-specific metrology
2023 · Houssam Chouaib, Anderson Chou, et al. · Metrology, Inspection, and Process Control XXXVI · 14
Rapid photoreflectance spectroscopy for strained silicon metrology
2008 · H. Chouaib, M. E. Murtagh, et al. · Review of Scientific Instruments · 13
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Photoreflectance study of GaAsSb∕InP heterostructures
2005 · H. Chouaib, C. Bru-Chevallier, et al. · Journal of Applied Physics · 13
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Fast and accurate scatterometry metrology method for STI CMP step height process evaluation
2012 · Chih-Hsun Lin, Climbing Huang, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12
Surface Fermi level in GaAsSb structures grown by molecular beam epitaxy on InP substrates
2008 · Houssam Chouaib, Catherine Bru-Chevallier, et al. · Applied Physics Letters · 9
Optical strain measurement in ultrathin sSOI wafer
2006 · J. Munguía, H. Chouaib, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 9
Scatterometry and machine learning for in-die overlay solution
2023 · FangJyun Yeh, Houssam Chouaib · Metrology, Inspection, and Process Control XXXVI · 8
Apply multiple target for advanced gate ADI critical dimension measurement by scatterometry technology
2012 · Wei-Jhe Tzai, Howard Chen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Strain dependence of the direct energy bandgap in thin silicon on insulator layers
2010 · J Munguía, J-M Bluet, et al. · Journal of Physics D Applied Physics · 7
Photoreflectance spectroscopy of self-organized InAs/InP(001) quantum sticks emitting at 1.55μm
2006 · H. Chouaib, N. Chauvin, et al. · Applied Surface Science · 7
A micro-optical modulation spectroscopy technique for local strain measurement
2011 · H. Chouaib, M. E. Murtagh, et al. · Review of Scientific Instruments · 6
Data feed-forward for improved optical CD and film metrology
2012 · L. Mihardja, M. Di, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Recess gate process control by using 3D SCD in 3xm vertical DRAM
2012 · Ming-Feng Kuo, Sheng-Hung Wu, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Photoreflectance study at the micrometer scale
2006 · C. Bru-Chevallier, H. Chouaib, et al. · Applied Surface Science · 5
Novel ellipsometry metrology-based machine learning technique for low sensitivity characterization of critical dimensions within gate-all-around transistors
2024 · Houssam Chouaib, Valeria Dimastrodonato, et al. · Metrology, Inspection, and Process Control XXXVI · 4
Photoreflectance Spectroscopic Characterization of Si with SiO[sub 2] and HfO[sub 2] Dielectric Layers
2009 · Tianhao Zhang, Ming Di, et al. · AIP conference proceedings · 3
Microphotoreflectance spectroscopy of heterojunction bipolar transistors under biasing voltage: Measurement of the net doping concentration
2007 · Houssam Chouaib, Catherine Bru-Chevallier · Applied Physics Letters · 3
Optical in die NZO benefit for DRAM manufacturing
2024 · Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, et al. · Metrology, Inspection, and Process Control XXXVI · 2
Enable in-die overlay measurement on DRAM storage node by line scan self-calibration method
2024 · Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, et al. · Metrology, Inspection, and Process Control XXXVI · 2
Tracking the defects of ultra-thin HfO2 using a Cody-Lorentz multiple oscillator model
2018 · Aaron Rosenberg, Dawei Hu, et al. · Metrology, Inspection, and Process Control XXXVI · 2
A GaAsSb/InP HBT circuit technology
2005 · Godin, J., Riet, M., et al. · AMS Acta (University of Bologna) · 2
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Modeling the time-dependence of the photoreflectance spectroscopy on ultra-shallow As+ ion implanted silicon
2022 · Houssam Chouaib · Results in Optics · 1
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UV photoreflectance spectroscopy in strained silicon on insulator structures
2009 · Jacobo Munguía, Jean‐Marie Bluet, et al. · physica status solidi (a) · 1
Works count: 42
Citation count: 181
H-index: 8
I10-index: 6
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