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Adriaan J. M. Mackus

Observed names: A J M Mackus, A. J. M. Mackus, A. Mackus, A.J.M. Mackus, Adriaan J M Mackus, Adriaan J. M. Mackus (8377851), Adriaan J.M. Mackus, Adriaan Mackus, Adrie Mackus, Ajm Adrie Mackus, Mackus, A.J.M., Mackus, Adriaan, Mackus, Adriaan J. M., Mackus, Adrie
Observed institutions: Oxford Instruments (United Kingdom), Colorado School of Mines, SLAC National Accelerator Laboratory, J.A. Woollam Company (United States), Huazhong University of Science and Technology, Eindhoven University of Technology, The University of Texas at Austin, Stanford University
ORCID: 0000-0001-6944-9867
Observed ORCID: 0000-0001-6944-9867
OpenAlex ID: A5064064108
From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity
2018 · Adriaan J. M. Mackus, Marc J. M. Merkx, et al. · Chemistry of Materials · 440
The use of atomic layer deposition in advanced nanopatterning
2014 · A. J. M. Mackus, A. A. Bol, et al. · Nanoscale · 387
Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review
2018 · Adriaan J. M. Mackus, Joel R. Schneider, et al. · Chemistry of Materials · 287
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
2017 · Alfredo Mameli, Marc J. M. Merkx, et al. · ACS Nano · 207
Supported Core/Shell Bimetallic Nanoparticles Synthesis by Atomic Layer Deposition
2012 · Matthieu J. Weber, Adriaan J. M. Mackus, et al. · Chemistry of Materials · 165
Influence of Oxygen Exposure on the Nucleation of Platinum Atomic Layer Deposition: Consequences for Film Growth, Nanopatterning, and Nanoparticle Synthesis
2013 · Adriaan J. M. Mackus, Marcel A. Verheijen, et al. · Chemistry of Materials · 150
Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
2009 · W. M. M. Kessels, H. C. M. Knoops, et al. · Applied Physics Letters · 136
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Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
2012 · Adriaan J. M. Mackus, Noémi Leick, et al. · Chemistry of Materials · 129
Remote Plasma ALD of Platinum and Platinum Oxide Films
2009 · H. C. M. Knoops, A. J. M. Mackus, et al. · Electrochemical and Solid-State Letters · 129
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Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2017 · Joseph A. Singh, Nick F. W. Thissen, et al. · Chemistry of Materials · 123
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Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
2015 · Adriaan J M Mackus, Matthieu J Weber, et al. · Nanotechnology · 120
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Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
2011 · L. Baker, A. S. Cavanagh, et al. · Journal of Applied Physics · 114
Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching
2019 · Martijn F. J. Vos, Sonali N. Chopra, et al. · Chemistry of Materials · 113
Tandem Core–Shell Si–Ta3N5 Photoanodes for Photoelectrochemical Water Splitting
2016 · Ieva Narkeviciute, Pongkarn Chakthranont, et al. · Nano Letters · 111
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A Process for Topographically Selective Deposition on 3D Nanostructures by Ion Implantation
2016 · Woo-Hee Kim, Fatemeh Sadat Minaye Hashemi, et al. · ACS Nano · 104
Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition
2019 · Alfredo Mameli, Bora Karasulu, et al. · Chemistry of Materials · 94
Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide
2016 · Adriaan J. M. Mackus, Callisto MacIsaac, et al. · The Journal of Chemical Physics · 91
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Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
2020 · Shashank Balasubramanyam, Marc J. M. Merkx, et al. · ACS Materials Letters · 88
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Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
2007 · E. Langereis, H. C. M. Knoops, et al. · Journal of Applied Physics · 82
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Room-Temperature Atomic Layer Deposition of Platinum
2013 · Adriaan J. M. Mackus, Diana Garcia-Alonso, et al. · Chemistry of Materials · 80
Area-Selective Atomic Layer Deposition of TiN Using Aromatic Inhibitor Molecules for Metal/Dielectric Selectivity
2020 · Marc J. M. Merkx, Sander Vlaanderen, et al. · Chemistry of Materials · 78
Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
2009 · A. J. M. Mackus, S. B. S. Heil, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 78
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Mechanism of Precursor Blocking by Acetylacetone Inhibitor Molecules during Area-Selective Atomic Layer Deposition of SiO2
2020 · Marc J. M. Merkx, Tania E. Sandoval, et al. · Chemistry of Materials · 77
Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition
2010 · A. J. M. Mackus, J. J. L. Mulders, et al. · Journal of Applied Physics · 76
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Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation
2017 · Alfredo Mameli, Yinghuan Kuang, et al. · Chemistry of Materials · 73
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Works count: 144
Citation count: 4,945
H-index: 37
I10-index: 63
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