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Cornel Bozdog

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM
2011 · Alok Vaid, Bin Bin Yan, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 74
Optical detection of electron paramagnetic resonance in electron-irradiated GaN
1999 · C. Bozdog, H. Przybylinska, et al. · Physical review. B, Condensed matter · 68
Intrinsic defects in GaN. I. Ga sublattice defects observed by optical detection of electron paramagnetic resonance
2004 · K. H. Chow, L. S. Vlasenko, et al. · Physical Review B · 49
Electron paramagnetic resonance of Cu(d9) in GaN
2000 · C. Bozdog, K. H. Chow, et al. · Physical review. B, Condensed matter · 21
Hybrid metrology solution for 1X node technology
2012 · Alok Vaid, Alexander Elia, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 20
Hybrid metrology: from the lab into the fab
2014 · Alok Vaid, Alexander Elia, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 17
Implementation of hybrid metrology at HVM fab for 20nm and beyond
2013 · Alok Vaid, Lokesh Subramany, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 17
Holistic metrology approach: hybrid metrology utilizing scatterometry, critical dimension-atomic force microscope and critical dimension-scanning electron microscope
2011 · Alok Vaid, Bin Bin Yan, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 16
Hybrid approach to optical CD metrology of directed self-assembly lithography
2013 · Stephane Godny, Masafumi Asano, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 12
Measuring self-aligned quadruple patterning pitch walking with scatterometry-based metrology utilizing virtual reference
2016 · Taher Kagalwala, Alok Vaid, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 10
Product-driven material characterization for improved scatterometry time-to-solution
2009 · Alok Vaid, Carsten Hartig, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 9
Optical detection of electron paramagnetic resonance in low-dislocation-content GaN grown by hydride vapor-phase epitaxy
2002 · C. Bozdog, G. D. Watkins, et al. · Physical review. B, Condensed matter · 9
Novel diffraction based overlay metrology utilizing phase-based overlay for improved robustness
2021 · Masazumi Matsunobu, Toshiharu Nishiyama, et al. · Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV · 8
Advanced in-line optical metrology of sub-10nm structures for gate all around devices (GAA)
2016 · Raja Muthinti, Nicolas Loubet, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Hybrid metrology universal engine: co-optimization
2014 · Alok Vaid, Carmen Osorio, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets
2010 · Alok Vaid, Matthew Sendelbach, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 8
FTIR Measurements of Thickness and Free Carrier Concentration in GaN‐Based Films
2002 · C. Bozdog, V. Yakovlev, et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 8
Hybrid enabled thin film metrology using XPS and optical
2016 · Alok Vaid, Givantha Iddawela, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Scatterometry-based metrology for SAQP pitch walking using virtual reference
2016 · Taher Kagalwala, Alok Vaid, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Scatterometry-based defect detection for DSA in-line process control
2015 · Robin Chao, Chi-Chun Liu, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Intrinsic defects in GaN: what we are learning from magnetic resonance studies
2003 · George D Watkins, K.H Chow, et al. · Physica B Condensed Matter · 7
Defects observed by optical detection of electron paramagnetic resonance in electron-irradiatedp-type GaN
2002 · L. S. Vlasenko, C. Bozdog, et al. · Physical review. B, Condensed matter · 7
Improved scatterometry time-to-solution using virtual reference
2015 · Alok Vaid, Givantha Iddawela, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6
Stress and strain in automotive diodes-a RVT, IR and XR study
2002 · L. Galateanu, M. Stoica, et al. · CAS proceedings · 6
Advanced in-line metrology strategy for self-aligned quadruple patterning
2016 · Robin Chao, Mary Breton, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
Works count: 49
Citation count: 464
H-index: 10
I10-index: 10
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