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Ulrich Schaber
Observed names:
Schaber, U.,
U Schaber,
U. Schaber
Institution:
Fraunhofer Research Institution for Microsystems and Solid State Technologies
Observed institutions:
Fraunhofer Institute for Microelectronic Circuits and Systems,
Fraunhofer Research Institution for Microsystems and Solid State Technologies,
Fraunhofer Institute for Reliability and Microintegration,
Fraunhofer-Gesellschaft
OpenAlex ID:
A5067814970
Amorphous silicon carbide and its application in silicon micromachining
1994
·
A. Klumpp
, U. Schaber
, et al.
·
Sensors and Actuators A Physical
·
55
A thin film bolometer using porous silicon technology
1994
·
W. Lang
, P. Steiner
, et al.
·
Sensors and Actuators A Physical
·
38
Surface acoustic wave devices and applications in liquid sensing
1997
·
A Leidl
, I Oberlack
, et al.
·
Smart Materials and Structures
·
24
PDF
Advanced silicon trench etching in MEMS applications
1998
·
Karl Kuehl
, Steffan Vogel
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
23
Pneumatic Silicon Microvalves with Piezoelectric Actuation
2001
·
S. Kluge
, G. Neumayer
, et al.
·
Springer eBooks
·
12
A monolithically integrated sensor system using sensor-specific CMOS cells
1995
·
J. Weber
, S. Seitz
, et al.
·
Sensors and Actuators A Physical
·
11
Anisotropic etching for optical gratings
1995
·
A. Klumpp
, K. Kühl
, et al.
·
Sensors and Actuators A Physical
·
10
Batch Fabrication of Silicon Micropumps
2001
·
M. Richter
, J. Kruckow
, et al.
·
Springer eBooks
·
9
Bulk micromachining of Ge for IR gratings
1996
·
W Lang
, R Leancu
, et al.
·
Journal of Micromechanics and Microengineering
·
9
PDF
Electrostatic wafer handling for thin wafer processing
2009
·
Christof Landesberger
, Robert Wieland
, et al.
·
Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft)
·
8
Superconducting Titanium Nitride in Through-Silicon Vias for 3D Integration of Qubits
2024
·
Alexandra Schewski
, Ulrich Schaber
, et al.
·
IEEE International D Systems Integration Conference
·
3
Electrically removable, micromachined encapsulation for sensitive materials
1997
·
M. Roth
, S. Vogel
, et al.
·
Sensors and Actuators A Physical
·
3
A Portable Drug Delivery System with Silicon Capillaries as Key Components
2001
·
M. Richter
, N. Lutter
, et al.
·
Springer eBooks
·
2
Anisotropic etching for optical gratings
1996
·
A. Klumpp
, K. Kühl
, et al.
·
Elsevier eBooks
A Smart Sensor Device Realized in Standard CMOS-Technology based on an ASIC-Design
1995
·
Julian Weber
, Stefan Seitz
, et al.
·
European Solid-State Device Research Conference
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Works count:
27
Citation count:
208
H-index:
9
I10-index:
7
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