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Sho Nagatomo
Institution:
Sumco Corporation (Japan)
Observed institutions:
Sumco Corporation (Japan),
The University of Tokyo
ORCID:
0009-0009-3660-7422
Observed ORCID:
0009-0009-3660-7422
OpenAlex ID:
A5071898959
Near-infrared laser annealing of Ge layers epitaxially grown on Si for high-performance photonic devices
2017
·
Sho Nagatomo
, Yasuhiko Ishikawa
, et al.
·
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
·
15
Post-Growth Laser Annealing for High-Performance Ge Photodiodes on Si
2014
·
Yuta Kawamata
, Sho Nagatomo
, et al.
·
ECS Transactions
·
2
Recrystallization kinetics of fully amorphized C3H5-molecular-ion-implanted silicon substrate surface
2025
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
MRS Advances
·
1
Surface Recrystallization Model of Fully Amorphized C3H5-Molecular-Ion-Implanted Silicon Substrate
2024
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
Crystals
·
1
PDF
Boosting CMOS Image Sensors: Exploring Silicon Hydride and Hydrocarbon Molecular Ion Implanted in Epitaxial Wafers
2026
·
Ayumi Onaka-Masada
, Ryo Hirose
, et al.
·
Sensors
Impact of Cumulative Pulsed Laser Irradiation on Recrystallization of Amorphized C3H5-Molecular-Ion-Implanted Silicon Substrate Surface
2025
·
Koji Kobayashi
, Ryosuke Okuyama
, et al.
·
International Workshop on Junction Technology
Metallic Impurity Gettering Behavior of Hydrocarbon-Molecular-Ion-Implanted Epitaxial Silicon Wafer During the Pn-Junction Diode Fabrication Process
2025
·
Sho Nagatomo
, Takeshi Kadono
, et al.
·
International Workshop on Junction Technology
Novel Production Concept of CH2F-Molecular-Ion Implanted Si Epitaxial Wafer for Highly Sensitive 3D-Stacked CMOS Image Sensors
2025
·
Ryo Hirose
, Koji Kobayashi
, et al.
·
International Workshop on Junction Technology
Metallic Impurity Gettering Behavior of Hydrocarbon-Molecular-Ion-Implanted Epitaxial Silicon Wafer During the pn-Junction Diode Fabrication Process
2025
·
Sho Nagatomo
, Takeshi Kadono
, et al.
·
IEEE Journal of the Electron Devices Society
Novel Production Concept of CH 2 F-Molecular-Ion Implanted Si Epitaxial Wafer for Highly Sensitive 3-D-Stacked CMOS Image Sensors
2025
·
Ryo Hirose
, Koji Kobayashi
, et al.
·
IEEE Journal of the Electron Devices Society
High-performance Ge-on-Si Near-infrared Photodiodes
2016
·
Yasuhiko Ishikawa
, Yuji Miyasaka
, et al.
·
IEICE Technical Report; IEICE Tech. Rep.
Post-Growth Laser Annealing for High-Performance Ge Photodiodes on Si
2014
·
Yuta Kawamata
, Sho Nagatomo
, et al.
·
ECS Meeting Abstracts
High-performance Ge-on-Si pin photodiodes using a laser annealing process (2)
2014
·
Sho Nagatomo
, Shinya Kikuta
, et al.
·
The Japan Society of Applied Physics
Effect of post-growth annealing on thin-film Ge pin photodiodes on Si
2014
·
Sho Nagatomo
·
The Japan Society of Applied Physics
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Works count:
14
Citation count:
19
H-index:
2
I10-index:
1
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