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Gaël Borvon

Analysis of Low-k Organosilicon and Low-Density Silica Films Deposited in HMDSO Plasmas
2002 · G. Borvon, A. Goullet, et al. · Plasmas and Polymers · 38
Efficient and low-damage nitrogen doping of graphene via plasma-based methods
2015 · Yu-Pu Lin, Younal Ksari, et al. · Carbon · 31
Electrical properties of low-dielectric-constant films prepared by PECVD in O2/CH4/HMDSO
2002 · G Borvon, A Goullet, et al. · Materials Science in Semiconductor Processing · 25
Mechanisms Involved in the Conversion of ppHMDSO Films into SiO2‐Like by Oxygen Plasma Treatment
2006 · Agnès Granier, Gael Borvon, et al. · Plasma Processes and Polymers · 24
Effect of the ion bombardment energy on silicon dioxide films deposited from oxygen/tetraethoxysilane plasmas in a helicon reactor
2004 · D. Goghero, A. Goullet, et al. · Thin Solid Films · 12
Poly-Si/SiOx Passivating Contacts on Both Sides: A Versatile Technology For High Efficiency Solar Cells
2021 · Thibaut Desrues, Adeline Lanterne, et al. · Conference record of the IEEE Photovoltaic Specialists Conference · 10
The combined study of the organosilicon films by RBS, ERDA and AFM analytical methods obtained from PECVD and PACVD
2004 · A. Mackova, V. Perina, et al. · Surface Science · 8
Hydrogenation of sputtered ZnO:Al layers for double side poly-Si/SiOx solar cells
2022 · Charles Seron, Thibaut Desrues, et al. · EPJ Photovoltaics · 5
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Recent developments on PULSION® PIII tool: FinFET 3D doping, high temp implantation, III-V doping, contact and silicide improvement, & 450 mm
2015 · Frank Torregrosa, Yohann Spiegel, et al. · International Workshop on Junction Technology · 2
Implantation and metrology solutions for low energy boron implant on 450mm wafers
2014 · A-S. Robbes, K-A B-T. Meura, et al. · International Conference on Ion Implantation Technology · 2
Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes
2020 · Laurent Lachal, Christophe Plantier, et al. · ECS Transactions · 1
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Nitride stress inversion using plasma immersion ion implantation processes
2023 · L. Lachal, C. Plantier, et al. · MRS Advances
Ex-situ Hydrogenation of Sputtered Transparent Conductive Oxide layers by Plasma Immersion Ion Implantation
2020 · Charles Seron, Thibaut Desrues, et al. · Conference record of the IEEE Photovoltaic Specialists Conference
Strain Modification of PECVD Nitride By Plasma Immersion Ion Implantation Processes
2020 · Laurent Lachal, Christophe Plantier, et al. · ECS Meeting Abstracts
Functionalized Oxides for Bifacial Solar Cells with Passivated Contacts: First Results of the OXYGEN Project
2019 · Desrues, Thibaut, Morisset, Audrey, et al. · HAL
Advantages and Challenges of Plasma Immersion Ion Implantation for Power Devices Manufacturing on Si, SiC and GaN using PULSION® Tool
2018 · Frank Torregrosa, Yohann Spiegel, et al. · International Conference on Ion Implantation Technology
Study of AsH3 Plasma Immersion Ion Implantation using PULSION®
2014 · Julian Duchaine, Frank Torregrosa, et al. · International Conference on Ion Implantation Technology
Front Cover: Plasma Process. Polym. 4‐5/2006
2006 · Agnès Granier, Gael Borvon, et al. · Plasma Processes and Polymers
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Etching of HfO2 and HfSiOx ay elevated temperatures
2004 · Helot, M., Borvon, G., et al. · HAL
Mechanisms involved in the transformation of ppHMDSO films into SiO2-like by oxygen plasma treatment
2003 · Borvon, G., Bousquet, Angelique, et al. · HAL
Élaboration par plasma d'hexaméthyldisiloxane de couches minces à faible constante diélectrique pour applications aux interconnexions en CMOS
2003 · Gaël Borvon · OpenGrey (Institut de l'Information Scientifique et Technique)
Works count: 23
Citation count: 160
H-index: 7
I10-index: 6
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