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K. C. Chen
Observed names:
K.C. Chen,
Kuang-Chao Chen
Institution:
Macronix International (Taiwan)
Observed institution:
Macronix International (Taiwan)
ORCID:
0000-0002-7715-808X
Observed ORCID:
0000-0002-7715-808X
OpenAlex ID:
A5074218302
Polycrystalline-silicon channel trap induced transient read instability in a 3D NAND flash cell string
2016
·
Wen-Jer Tsai
, W. L. Lin
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
37
Poly-Silicon Trap Position and Pass Voltage Effects on RTN Amplitude in a Vertical NAND Flash Cell String
2016
·
Y. L. Chou
, Tahui Wang
, et al.
·
IEEE Electron Device Letters
·
27
Highly reliable 2-bit/cell nitride trapping flash memory using a novel array-nitride-sealing (ANS) ONO process
2006
·
Yen-Hao Shih
, S.C. Lee
, et al.
·
Technical digest - International Electron Devices Meeting/Technical digest
·
18
Overlay target design and evaluation for SADP process
2012
·
C. W. Yeh
, Chao-Tien H. Huang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
16
Study of electron and hole injection statistics of BE-SONOS NAND Flash
2010
·
Hang-Ting Lue
, Tzu-Hsuan Hsu
, et al.
·
IEEE International Memory Workshop (IMW)
·
9
Within-wafer CD variation induced by wafer shape
2016
·
Chi-hao Huang
, Mars Yang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
7
Junction optimization for Reliability issues in floating gate NAND flash cells
2011
·
C. H. Lee
, I. C. Yang
, et al.
·
IEEE International Reliability Physics Symposium proceedings
·
7
Novel ATHENA mark design to enhance alignment quality in double patterning with spacer process
2010
·
L. W. Chen
, Mars Yang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
6
Rule-based hotspot correction using a pattern matching flow
2021
·
Bradley J. Falch
, Tony Hu
, et al.
·
SPIE Design-Process-Technology Co-optimization
·
5
Exposure process optimization using machine learning overlay prediction
2022
·
Masahiro Yoshida
, Wei-Hung Wang
, et al.
·
Metrology, Inspection, and Process Control XXXVI
·
4
Investigation of data pattern effects on nitride charge lateral migration in a charge trap flash memory by using a random telegraph signal method
2018
·
Y. H. Liu
, H. Y. Lin
, et al.
·
IEEE International Reliability Physics Symposium proceedings
·
4
Overlay degradation induced by film stress
2017
·
Chi-hao Huang
, Yu-Lin Liu
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
4
SMO and NTD for robust single exposure solution on contact patterning for 40nm node flash memory devices
2013
·
Chih-Chieh Yu
, C. C. Yang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
4
Cell endurance prediction from a large-area SONOS capacitor
2009
·
C. H. Lee
, W. H. Tu
, et al.
·
IEEE International Reliability Physics Symposium proceedings
·
4
Imaging-based overlay metrology optimized by HV-SEM in 3D-NAND process
2021
·
Yu-Lin Liu
, Li-Ting Chang
, et al.
·
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
·
3
Chip-level characterization and RTN-induced error mitigation beyond 20nm floating gate flash memory
2018
·
T. W. Lin
, S. H. Ku
, et al.
·
IEEE International Reliability Physics Symposium proceedings
·
3
Optimizing the lithography model calibration algorithms for NTD process
2016
·
C. M. Hu
, Fred Lo
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
3
Overall operation considerations for a SONOS-based memory
2009
·
C. H. Lee
, W. H. Tu
, et al.
·
International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)
·
3
Investigation of device overlay variation and control metrology in 3D-NAND process
2023
·
Yu-Lin Liu
, Li-Ting Chang
, et al.
·
Metrology, Inspection, and Process Control XXXVI
·
2
CD uniformity control for thick resist process
2017
·
Chi-hao Huang
, Yu-Lin Liu
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Pattern collapse solution for asymmetric pattern
2017
·
C. J. Tu
, C. H. Huang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
CD uniformity improvement of dense contact array in negative tone development process
2015
·
Fengnien Tsai
, Teng-hao Yeh
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Variations of $V_{t}$ Retention Loss in a SONOS Flash Memory Due to a Current-Path Percolation Effect
2011
·
Y. L. Chou
, Y. T. Chung
, et al.
·
IEEE Electron Device Letters
·
2
A comprehensive comparison between double patterning and double patterning with spacer on sub-50nm product implementation
2008
·
C. F. Tseng
, C. C. Yang
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
A Robust Read-Based PUF Generation Method in a 3-D NAND Flash Memory
2026
·
You-Liang Chou
, Wen-Jer Tsai
, et al.
·
IEEE Transactions on Electron Devices
·
1
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Works count:
51
Citation count:
187
H-index:
7
I10-index:
4
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