Author

Jon L. Ebert

Observed names: J Ebert, J. Ebert, J. L. Ebert, J.L. Ebert, Jon Ebert

Observed institutions: Integrated Systems Incorporation (United States), SC Solutions (United States), Stanford University

OpenAlex ID: A5078018592

Nonlinear model reduction for simulation and control of rapid thermal processing

1997 · H. Aling, S. Banerjee, et al. · Proceedings of the ... American Control Conference/Proceedings of the American Control Conference · 44

Modeling and control of distributed thermal systems

2003 · A. Emami-Naeini, J.L. Ebert, et al. · IEEE Transactions on Control Systems Technology · 40

Chemical composition and size distributions for fly ashes

1995 · Sarbajit Ghosal, Jon L. Ebert, et al. · Fuel Processing Technology · 31

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Thermal modeling and control of rapid thermal processing systems

2002 · J.L. Ebert, A. Emami-Naeini, et al. · IEEE Conference on Decision and Control (CDC) · 19

Model-based control of rapid thermal processing for semiconductor wafers

2004 · J.L. Ebert, D. de Roover, et al. · Proceedings of the ... American Control Conference/Proceedings of the American Control Conference · 17

Nonlinear model reduction with application to rapid thermal processing

2002 · H. Aling, R.L. Kosut, et al. · IEEE Conference on Decision and Control (CDC) · 17

The infrared refractive indices of CHBr3, CCl4 and CS2

1993 · Sarbajit Ghosal, Jon L. Ebert, et al. · Infrared Physics · 15

Application of a Nonlinear Model Reduction Method to Rapid Thermal Processing (RTP) Reactors

1996 · H. Aling, J.L. Ebert, et al. · IFAC Proceedings Volumes · 14

Model-based control for chemical-mechanical planarization (CMP)

2004 · D. de Roover, A. Emami-Naeini, et al. · Proceedings of the ... American Control Conference/Proceedings of the American Control Conference · 12

Reactor-scale models for rf diode sputtering of metal thin films

1999 · S. Desa, S. Ghosal, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 10

Run-to-run control of static systems

2002 · R.L. Kosut, D. de Roover, et al. · IEEE Conference on Decision and Control (CDC) · 9

Rigorous bounds on the radiative interaction between real gases and scattering particles

1987 · D.G. Goodwin, J.L. Ebert · Journal of Quantitative Spectroscopy and Radiative Transfer · 9

Active Control of Flow Over a Backward-Facing Step

2006 · A. Emami-Naeini, S.A. McCabe, et al. · IEEE Conference on Decision and Control (CDC) · 7

Model-based control for semiconductor and advanced materials processing: an overview

2004 · A. Emami-Naeini, J.L. Ebert, et al. · Proceedings of the ... American Control Conference/Proceedings of the American Control Conference · 6

Model-based temperature control of heated plates

2010 · J. L. Ebert, G. W. van der Linden, et al. · International Conference on Advanced Thermal Processing of Semiconductors · 5

Fly Ash Size Distributions: Use of coulter multisizer and fitting to truncated lognormal distributions

1993 · Sarbajit Ghosal, Jon L. Ebert, et al. · Particle & Particle Systems Characterization · 5

Multiscale modeling and control of RF diode sputter deposition for GMR thin films

2004 · S. Ghosal, R.L. Kosut, et al. · Proceedings of the ... American Control Conference/Proceedings of the American Control Conference · 4

Efficient CFD modeling of single wafer semiconductor fabrication systems for closed-loop evaluation

2002 · J.L. Ebert, G.W. van der Linden, et al. · IEEE Conference on Decision and Control (CDC) · 4

Improving Recovery in the Yates Field Using Dynamic Feedback Loop based on Physics-Informed Artificial Intelligence

2020 · Dirk De Bruyker, Robert Kosut, et al. · 3

Command Shaping for MIMO Nonlinear Systems Using Iterative Learning Control With Application to an RTP System

2000 · Dick de Roover, Abbas Emami-Naeini, et al. · ASME International Mechanical Engineering Congress and Exposition (IMECE) · 3

SC-xScript: An Embedded Script Language for Scientific Computation in Embedded Systems.

2011 · Reng Zeng, Huang Yu, et al. · 1

Sputter Deposition of GMR Spin Valves

2000 · W. Zou, X.W. Zhou, et al. · MRS Proceedings

A radiation source for both the visible and the infrared

1993 · M.A. Havstad, D.L. Brown, et al. · Infrared Physics

Size distributions of fly ash using Coulter Multisizer: Use of multiple orifices and fitting to truncated log-normal distributions

1991 · Stanford Univ., CA (United States), S Ghosal, et al. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

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Size distributions of fly ash using Coulter Multisizer: Use of multiple orifices and fitting to truncated log-normal distributions. [Coulter Multisizer]

1991 · S. Ghosal, J.L. Ebert, et al. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

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Works count: 26

Citation count: 275

H-index: 10

I10-index: 10