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Kerim T. Arat

Observed names: Arat, K.T., Arat, Kerim T., K Arat, K T Arat, K. T. Arat, Kerim Arat, Kerim T Arat, Kerim Tugrul Arat
ORCID: 0000-0002-5446-3006
Observed ORCID: 0000-0002-5446-3006
OpenAlex ID: A5083387748
Charge-induced pattern displacement in E-beam lithography
2019 · Kerim T. Arat, Thomas Klimpel, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 20
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A Highly Integrated AFM-SEM Correlative Analysis Platform
2023 · A Alipour, K T Arat, et al. · Microscopy Today · 19
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Model improvements to simulate charging in scanning electron microscope
2019 · Kerim T. Arat, Thomas Klimpel, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 18
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Estimating Step Heights from Top-Down SEM Images
2019 · Kerim Tugrul Arat, Jens Bolten, et al. · Microscopy and Microanalysis · 18
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Model sensitivity analysis of Monte-Carlo based SEM simulations
2020 · Kerim T. Arat, Cornelis W. Hagen · Results in Physics · 15
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Electron beam lithography on curved or tilted surfaces: Simulations and experiments
2019 · Kerim T. Arat, Aernout C. Zonnevylle, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 8
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Limits of Resolutions in the Scanning Electron Microscope
2023 · András E Vladár, Kerim T Arat · Microscopy and Microanalysis · 7
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Electric fields in Scanning Electron Microscopy simulations
2016 · K. T. Arat, J. Bolten, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
A New Correlative Microscopy Platform Integrating AFM with in situ SEM
2023 · Kerim Arat, Hamed Alemansour, et al. · Microscopy and Microanalysis · 5
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In Situ AFM-SEM-EDS, a Correlative Microscopy Platform for Surface Characterization and Elemental Analysis
2024 · Kerim T Arat, Jost H Diederichs, et al. · Microscopy and Microanalysis · 4
Advances in correlative microscopy and next-generation devices toward the CHIPS Act
2025 · Christian H. Schwalb, Afshin Alipour, et al. · Applied Physics Reviews · 3
Nanoparticle Characterization with In Situ AFM-SEM-EDS
2024 · Kerim T Arat, X Fan Dong, et al. · Microscopy and Microanalysis · 3
Model improvements to simulate charging in SEM
2018 · Kerim T. Arat, Thomas Klimpel, et al. · Metrology, Inspection, and Process Control XXXVI · 1
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Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: and how to tackle them using computational techniques
2017 · Jens Bolten, Caroline Porschatis, et al. · European Mask and Lithography Conference (EMLC) · 1
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Correlative Analysis of Pearlescent Pigments
2026 · D Choksy, S Ladva, et al. · Microscopy and Microanalysis
Multi-Modal Approach for Quality Control and Failure Analysis of Metal Lines for Chiplets Integration
2025 · Kerim T Arat, Darshit Jangid, et al. · Microscopy and Microanalysis
Measurement methods and reference artifacts for the characterization of the SEM and its electron beam
2022 · András E. Vladár, Kerim Arat, et al. · Metrology, Inspection, and Process Control XXXVI
Getting your Scanning Electron Microscope to Perform at Atomic Resolution Levels
2021 · Andras Vladar, Kerim Arat · Microscopy and Microanalysis
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Simulation of Electron-Matter Interaction in Electron Beam Lithography and Metrology
2021 · Arat, K.T. · Research Repository (Delft University of Technology)
Electric fields in SEM simulations
2016 · Kerim T. Arat, J. Bolten, et al.
Works count: 22
Citation count: 129
H-index: 7
I10-index: 5
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