Author

Mirwais Aktary

Observed names: Aktary, M. Sharif., Aktary, Mirwais, M. Aktary

Institution: Applied Nanotools (Canada)

Observed institutions: University of Alberta, National Institute for Nanotechnology, Applied Nanotools (Canada)

OpenAlex ID: A5085077462

Morphology and Nanomechanical Properties of ZDDP Antiwear Films as a Function of Tribological Contact Time

2002 · Mirwais Aktary, Mark T. McDermott, et al. · Tribology Letters · 167

Silicon microring refractometric sensor for atmospheric CO_2 gas monitoring

2016 · Guangcan Mi, Cameron Horvath, et al. · Optics Express · 100

Silicon Photonic Circuit Design Using Rapid Prototyping Foundry Process Design Kits

2019 · Lukas Chrostowski, Hossam Shoman, et al. · IEEE Journal of Selected Topics in Quantum Electronics · 89

High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithography

2003 · Mirwais Aktary, Martin O. Jensen, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 72

Simulation of the spatial distribution and molecular weight of polymethylmethacrylate fragments in electron beam lithography exposures

2006 · M. Aktary, M. Stepanova, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 54

Morphological evolution of films formed from thermooxidative decomposition of ZDDP

2001 · Mirwais Aktary, Mark T. McDermott, et al. · Wear · 53

Fabrication and Characterization of Graphitic Carbon Nanostructures with Controllable Size, Shape, and Position

2009 · Rongbing Du, Solomon Ssenyange, et al. · Small · 46

Simulation of electron beam lithography of nanostructures

2010 · M. Stepanova, T. Fito, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 40

Subwavelength Grating Metamaterial Waveguides and Ring Resonators on a Silicon Nitride Platform

2022 · Cameron M. Naraine, Jocelyn N. Westwood‐Bachman, et al. · Laser & Photonics Review · 31

Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithography

2009 · M.A. Mohammad, T. Fito, et al. · Microelectronic Engineering · 26

Surface-Directed Deposition of Platinum Nanostructures on Graphite by Chemical Vapor Deposition

2000 · Mirwais Aktary, Christopher E. Lee, et al. · Langmuir · 20

Interdependence of optimum exposure dose regimes and the kinetics of resist dissolution for electron beam nanolithography of polymethylmethacrylate

2010 · M. A. Mohammad, T. Fito, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 17

Nanoscale resist morphologies of dense gratings using electron-beam lithography

2007 · M. A. Mohammad, S. K. Dew, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 11

The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution

2010 · Mohammad A., Taras Fito, et al. · InTech eBooks · 9

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A Moderate Confinement O-, S-, C-, and L-Band Silicon Nitride Platform Enabled by a Rapid Prototyping Integrated Photonics Foundry Process

2024 · Cameron M. Naraine, Batoul Hashemi, et al. · IEEE photonics journal · 8

Synthesis and characterization of calixarene derivatives as resist materials for electron-beam lithography

2006 · Mirwais Aktary, Kenneth L. Westra, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 4

Prototyping of silicon nitride photonic integrated circuits for visible and near-infrared applications

2023 · Cameron Horvath, Jocelyn N. Westwood-Bachman, et al. · Integrated Optics: Devices, Materials, and Technologies · 3

Morphology and Nanoindentation Profiles of Automotive Engine Components

2002 · M. Aktary, M. T. McDermott, et al. · Surface Engineering · 3

Double-Illumination All-Optical Nanoalignment for Stacking X-Ray Fresnel Zone Plates

2025 · Siqi Wang, Cheng Jiang, et al. · Advanced Devices & Instrumentation · 2

Silicon Nitride Ring Resonators Based on Subwavelength Grating Metamaterials

2022 · Cameron M. Naraine, Jocelyn N. Westwood-Bachman, et al. · Conference on Lasers and Electro-Optics · 2

Poly(ether sulfone) as a negative resist for electron beam lithography

2007 · R. M. Bryce, M. R. Freeman, et al. · Applied Physics Letters · 2

Rapid Prototyping of Silicon Nitride Integrated Photonics Platforms for Visible to Mid-IR Circuits

2025 · Batoul Hashemi, Cameron M. Naraine, et al. · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

Hybrid monolithic silicon photonic waveguides for on-chip light sources

2025 · Jonathan Bradley, Batoul Hashemi, et al. · Smart Photonic and Optoelectronic Integrated Circuits

Fabrication and characterization of zone plates for EUV applications

2023 · Remko van den hurk, Robert Peters, et al.

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Prototyping of Silicon Nitride Photonic Integrated Circuits using Electron Beam Lithography

2022 · Cameron Horvath, Jocelyn N. Westwood-Bachman, et al. · Photonics North (PN)

Works count: 30

Citation count: 759

H-index: 12

I10-index: 13