Author

Varun P. Sharma

Institutions: Raja Ramanna Centre for Advanced Technology, Homi Bhabha National Institute

Observed institutions: Raja Ramanna Centre for Advanced Technology, Homi Bhabha National Institute

ORCID: 0000-0003-1813-3656

Observed ORCID: 0000-0003-1813-3656

OpenAlex ID: A5102007326

Study of metal-assisted chemical etching of silicon as an alternative to dry etching for the development of vertical comb-drives

2021 · Varun P. Sharma, Rahul Shukla, et al. · Journal of Micromanufacturing · 7

Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA

2021 · Rahul Shukla, Gowtham Beera, et al. · Journal of Micromanufacturing · 4

Probing the challenges in bulk micromachining of vertical comb-drive microactuators designed for manipulation of synchrotron radiation

2026 · Varun P. Sharma, S.K. Rai, et al. · Sensors and Actuators A Physical · 2

Finite Element Analysis of Squeezed Film Damping on Trapezoidal Microcantilever Resonators at Different Pressure Levels

2022 · Varun P. Sharma, Rahul Shukla · Mechanisms and machine science · 2

Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light

2022 · Varun P. Sharma, Tapas Ganguli, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2

Damping in vertical comb-drive microactuators at different pressures

2026 · Varun P. Sharma, Tapas Ganguli, et al. · Microsystem Technologies · 1

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A 4-DOF piezoelectric stage based on distributed electrode-excitation of piezoelectric unimorphs

2026 · Rahul Shukla, Harshal B. Wagh, et al. · Research Square

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Works count: 7

Citation count: 18

H-index: 2

I10-index: