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Mauro Alessandri

OpenAlex ID: A5103505227
High-k Materials in Flash Memories
2006 · Mauro Alessandri, Rossella Piagge, et al. · ECS Transactions · 15
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Evaluation of HfLaOx as Blocking Layer for Innovative Nonvolatile Memory Applications
2010 · Annalisa Del Vitto, Rossella Piagge, et al. · ECS Transactions · 5
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Effect of Wet Cleanings on GST Surface: XPS Characterization
2012 · Annamaria Votta, Francesco Pipia, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
Influence of Wet Cleaning on Tungsten Deposited with Different Techniques
2009 · Annamaria Votta, Francesco Pipia, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
Cu Surface Characterization after Wet Cleaning Processes
2009 · Francesco Pipia, Annamaria Votta, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
All-Wet Stripping of FEOL Photoresist Using Mixtures of Sulphuric Acid
2007 · Enrico Bellandi, Mauro Alessandri, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
Structural and Chemical Investigation of Annealed Al2O3 Films for Interpoly Dielectric Application in Flash Memories
2006 · Mauro Alessandri, Rossella Piagge, et al. · ECS Transactions · 4
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Behaviour of High-k Dielectric Materials with Classical Cleaning Chemistries
2003 · Enrico Bellandi, Barbara Crivelli, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
Surface morphology of nitrided thin thermal SiO2 studied by atomic force microscopy
1999 · Grazia Tallarida, Francesco Cazzaniga, et al. · Journal of Non-Crystalline Solids · 4
Particle Removal Efficiency and Silicon Roughness in HF-DIW/O3/Megasonics Cleaning
1998 · Mauro Alessandri, Enrico Bellandi, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
Fe and Cu Removal Efficiency in HF-DIW/O3 Cleaning Sequence
1998 · Francesco Pipia, Enrico Bellandi, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
Tungsten Oxidation Kinetic after Wet Cleaning: XPS and ToF-SIMS Characterization
2012 · Francesco Pipia, Annamaria Votta, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 3
Etch Rate Depth Profiling by Single Wafer Etching Equipment
2005 · Enrico Bellandi, Alice C. Elbaz, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 3
Post CMP Wet Cleaning Influence on Cu Hillocks
2016 · Annamaria Votta, Francesco Pipia, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2
Analysis of Oxidized Copper Surface and its Evolution
2012 · Francesca Milanesi, Francesco Pipia, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2
Influence of Dry Ashing and Wet Treatments on NVM Metal Gate Structures
2009 · Alice C. Elbaz, Enrico Bellandi, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2
AlCu Metal Line Corrosion: A Case Study
2007 · Francesco Pipia, Annamaria Votta, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2
All-Wet Stripping of FEOL Photoresist Using Mixtures of Sulphuric Acid
2007 · Enrico Bellandi, Mauro Alessandri, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
Etch Rate Profile Characterization of High-κ Materials
2007 · Annamaria Votta, Enrico Bellandi, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
Impact of RF Oxygen Plasma on Thermal Oxide Etch-Rate
2007 · Enrico Bellandi, Annamaria Votta, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
Study of SiO2 Modifications Induced by Oxygen Plasmas and Their Effect on Wet Processes
2007 · Annamaria Votta, Enrico Bellandi, et al. · ECS Transactions · 1
High-k Materials in Flash Memories
2006 · Mauro Alessandri, Rossella Piagge, et al. · ECS Meeting Abstracts · 1
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Etch Rate Depth Profiling by Single Wafer Etching Equipment
2005 · Enrico Bellandi, Alice C. Elbaz, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
Particle Addition Behaviour of Oxide Stripping by HF Solutions
1998 · Enrico Bellandi, Mauro Alessandri, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
Copper Catalysis Effect Investigation for TiW Etch Process on Patterned Wafers
2021 · Ivan Venegoni, Annamaria Votta, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
Works count: 37
Citation count: 77
H-index: 4
I10-index: 1
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