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Douglas R. Sparks

Application of MEMS technology in automotive sensors and actuators
1998 · D.S. Eddy, D.R. Sparks · Proceedings of the IEEE · 223
Chip-level vacuum packaging of micromachines using nanogetters
2003 · D.R. Sparks, S. Massoud-Ansari, et al. · IEEE Transactions on Advanced Packaging · 94
A MEMS-Based Coriolis Mass Flow Sensor for Industrial Applications
2008 · R. Smith, D.R. Sparks, et al. · IEEE Transactions on Industrial Electronics · 84
Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs
2005 · Douglas Sparks, Sonbol Massoud-Ansari, et al. · Journal of Micromechanics and Microengineering · 69
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Anomalous diffusion and gettering of transition metals in silicon
1986 · D. R. Sparks, R. G. Chapman, et al. · Applied Physics Letters · 47
An all-glass chip-scale MEMS package with variable cavity pressure
2006 · Douglas Sparks, Jacob Trevino, et al. · Journal of Micromechanics and Microengineering · 45
A CMOS integrated surface micromachined angular rate sensor: its automotive applications
2002 · D.R. Sparks, S.R. Zarabadi, et al. · International Conference on Solid-State Sensors, Actuators and Microsystems · 42
Reliable vacuum packaging using NanoGetters and glass frit bonding
2004 · Douglas Sparks, Sonbol Massoud-Ansari, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 39
Plasma Etching of Si, SiO2, Si3 N 4, and Resist with Fluorine, Chlorine, and Bromine Compounds
1992 · Douglas R. Sparks · Journal of The Electrochemical Society · 29
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Cyclic fatigue and creep of electroformed micromachines
2001 · Douglas R. Sparks, Michael I. Chia, et al. · Sensors and Actuators A Physical · 27
Flexible vacuum-packaging method for resonating micromachines
1996 · D.R. Sparks, L. Jordan, et al. · Sensors and Actuators A Physical · 27
The Use of Rapid Thermal Annealing for Studying Transition Metals in Silicon
1986 · Douglas R. Sparks, Randall G. Chapman · Journal of The Electrochemical Society · 26
Application of MEMS technology in automotive sensors and actuators
2002 · D.R. Sparks · International Symposium on Micro-NanoMechatronics and Human Science · 23
Micromachined needles and lancets with design adjustable bevel angles
2004 · Douglas Sparks, Timothy Hubbard · Journal of Micromechanics and Microengineering · 22
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Surface Micromachined Angular Rate Sensor
1995 · Jack D. Johnson, Seyed R. Zarabadi, et al. · SAE technical papers on CD-ROM/SAE technical paper series · 19
Angular rate sensor and accelerometer combined on the same micromachined CMOS chip
1998 · D. R. Sparks, X. Huang, et al. · Microsystem Technologies · 14
Output Drifting of Vacuum Packaged MEMS Sensors Due to Room Temperature Helium Exposure
2013 · Douglas Sparks, Jay Mitchell, et al. · Journal of Sensor Technology · 12
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Vacuum reduction of extraterrestrial silicates
1988 · Douglas R. Sparks · Journal of Spacecraft and Rockets · 12
Dissolution of Transition Metal Precipitates in Silicon by Rapid Thermal Processing
1987 · Douglas R. Sparks · Journal of The Electrochemical Society · 11
Hybrid rocket propellants from lunar material
1988 · Douglas R. Sparks · Acta Astronautica · 9
The hermeticity of sealed microstructures under low temperature helium and hydrogen exposure
2012 · Douglas Sparks · Journal of Micromechanics and Microengineering · 5
The Behavior of Transition Metals in Silicon during Annealing Transients
1991 · D.R. Sparks, N.S. Alvi, et al. · Defect and diffusion forum/Diffusion and defect data, solid state data. Part A, Defect and diffusion forum · 4
Long-Range Diffusion of Transition Metals in Silicon During Rapid Thermal Annealing
1989 · D.R. Sparks, N.S. Alvi, et al. · MRS Proceedings · 4
Automotive applications for micromachining
1997 · Douglas R. Sparks, Shih-Chia Chang · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Chemically-accelerated corrosion tests for aluminum metallized ICs
1993 · Douglas R. Sparks · Thin Solid Films · 3
Works count: 37
Citation count: 902
H-index: 15
I10-index: 19
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