1994 · E. Di Fabrizio, M. Gentili, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 81
2003 · A.W. Stevenson, T.E. Gureyev, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 66
1993 · A. A. Krasnoperova, J. Xiao, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 23