Author

Sang Jeen Hong

Observed name: Hong, Sang Jeen

Observed institution: Myongji University

ORCID: 0009-0004-4962-337X

Observed ORCID: 0009-0004-4962-337X

OpenAlex ID: A5113237928

Use of plasma process diagnostic sensors for the monitoring of in situ dry cleaning of plasma enhanced chemical vapor deposition chamber

2024 · Young Min You, Ji Seok Lee, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 10

Enhancement of chamber dry-cleaning performance with nitrous oxide additive to carbonyl fluoride

2025 · Hyuck Byun, Chae Woon Kim, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2

Process Metrology and Validation for 3D Advanced Packaging: A Comprehensive Review

2026 · Seung-Joon Paik, Kyoung-Sik “Jack” Moon, et al. · Journal of the Korean Society of Manufacturing Process Engineers · 1

Selective metal-carbides hardmask strip with chlorine and oxygen plasma

2025 · Wan Soo Song, Paul Yang, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 1

Enhancement of etch rate and selectivity for tungsten carbide hardmask

2026 · Wan Soo Song, Beom Seok Kim, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Design of plasma strip chamber for uniform gas supply with fluid flow simulation

2024 · Ji Won Jang, Se Yun Jo, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Works count: 8

Citation count: 14

H-index: 2

I10-index: 1