Work

Integrating Solution-Derived 3D PZT Structures on Si Mems Platform for RF and Biomedical Applications

Year: 2006

Type: conference-abstract

Source: International Symposium on Advanced Packaging Materials

DOI: 10.1109/isapm.2006.1666018

Authors: P.M. Raj, I.R. Abothu, R. Abdolvand, F. Ayazi, Rao Tummala

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1548882912

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